Massachusetts Institute of Technology

Other

United States of America as Represented by the Secretary of the Air Force

Carl O Bozler

John C Fan

Robert W McClelland

Steven W Rabe

Jeremy Bert Muldavin

Mark Alexander Hollis

Shaun R Berry

Kirby B Nichols

R Allen Murphy

Gary D Alley

Craig L Keast

William T Lindley

Frederick J Leonberger

Lawrence J Kushner

Robert K Reich

Harry R Clark

Ivars Melngailis

Normand J Bergeron, Jr

Ralph L Chapman

Richard G Drangmeister

Robert J Parr

Dale C Flanders

Todd A Thorsen

Peter S Whitney

Daniel J Ehrlich

Philip J Bos

Mark A Gouker

Douglas Bryant

Jeffrey Y Tsao

Peter W Wyatt

Raoul Ouatagom Ouedraogo

W Gregory Lyons

Eric Phelps

Sean M Duffy

Christopher Cherry

Valerie A Finnemeyer

Christopher T Harris

Miniature multifunctional antennas and related techniques are disclosed that are capable of wide bandwidth operation. In some embodiments, the antennas are capable of being reconfigured in the field for optimal performance in different frequency band configurations (e.g., a single wide instantaneous bandwidth, multiple smaller bands, etc.) and/or for purposes of self healing. In some embodiments, the antennas can be reconfigured in the field to achieve different polarizations (e.g., vertical, horizontal, circular). The antennas can be implemented in a very compact manner making them ideal for use in devices and platforms where size and weight are a concern.

Miniature ultra-wideband multifunctional antennas and related techniques

Liquid crystal photonic devices and microcavities filled with liquid crystal materials are becoming increasingly popular. These devices often present a challenge when it comes to creating a robust alignment layer in pre-assembled cells. Previous research on photo-definable alignment layers has shown that they have limited stability, particularly against subsequent light exposure. A method of infusing a dye into a microcavity to produce an effective photo-definable alignment layer is described, along with a method of utilizing a pre-polymer infused into the microcavity mixed with the liquid crystal to provide photostability. In this method, the polymer layer, formed under optical irradiation of liquid crystal cells, is effectively localized to a thin region near the substrate surface and thus provides a significant improvement in the photostability of the liquid crystal alignment. This versatile alignment layer method, which can be used in microcavities to displays, offers significant promise for new photonics applications.

Methods and apparatus for liquid crystal photoalignment

A mechanical memory transistor includes a substrate having formed thereon a source region and a drain region. An oxide is formed upon a portion of the source region and upon a portion of the drain region. A pull up electrode is positioned above the substrate such that a gap is formed between the pull up electrode and the substrate. A movable gate has a first position and a second position. The movable gate is located in the gap between the pull up electrode and the substrate. The movable gate is in contact with the pull up electrode when the movable gate is in a first position and is in contact with the oxide to form a gate region when the movable gate is in the second position. The movable gate, in conjunction with the source region and the drain region and when the movable gate is in the second position, form a transistor that can be utilized as a non-volatile memory element.

Mechanical memory transistor

The high-pixel-count uncooled thermal imaging arrays disclosed herein have liquid crystal (LC) microcavity transducers separate from the read-out integrated circuit (ROIC). The transducer converts incident infrared (IR) radiation in birefringence changes that can be measured with visible light. In other words, the system uses the temperature sensitivity of the LC birefringence to convert the IR scene to a visible image. Measurements on sample arrays indicate that the LC material quality is similar to that of bulk samples and has good noise performance. Additionally, high-fill-factor arrays on fused-silica substrates may be processed to enable optimization of conditions for greatly improved temperature sensitivity. An additional IR absorber layer may be integrated into the process to tune the structure for the infrared.

Systems, methods, and apparatus for sensitive thermal imaging

A device includes a device wafer having a circuit component formed thereon and having vias formed therein and a cap wafer bonded to the device wafer. The cap wafer has a cavity therein. The cavity has a post formed therein, and the post is positioned to mechanically support the vias formed in the device wafer. The cavity has a volume, the volume substantially enclosing the circuit component formed on the device wafer. The cavity has a width and height such that an impedance of a transmission line is dependent upon the width and height of the cavity, or the impedance of a transmission line is dependent upon the width of a center conductor within the cavity.

Wide band and radio frequency waveguide and hybrid integration in a silicon package

A micro-electromechanical system switch includes a substrate and a plurality of actuating electrodes formed the substrate wherein each actuating electrode is activatable. A cantilever beam has a first end and a second end and a plurality of stops formed thereon. The plurality of stops engages the substrate between the plurality of actuating electrode. A contact area is formed in the substrate and located to engage the second end of the cantilever beam. A voltage source applies a voltage to each actuating electrode independently in a sequence from an actuating electrode located adjacent to the first end of the cantilever beam to an actuating electrode located adjacent to the second end of the cantilever beam so that the plurality of stops sequentially engage the substrate between the plurality of actuating electrodes.

Micro-electro mechanical tunneling switch

A deformable reflector includes a plurality of MEMS devices, each having an electrode membrane having a reflective surface thereon, a flat surface, and a pulldown electrode formed in the flat substrate. The electrode membrane has substantially a same flatness of the flat substrate when the electrode membrane comes into contact with the flat substrate across a majority of its surface area in response to a voltage being applied to the pulldown electrode. The electrode membrane has a two-dimensional curvature when no voltage is applied to the pulldown electrode.

Light modulating mirror device and array

A capacitive RF switch and DC RF switch include a fixed electrode having a thin layer of metal and at least one pull-down electrode. A moving plate has a plurality of corrugations and a selective finger design. The capacitive switch includes a selective finger that comes into contact with the fixed electrode so as to minimize the stiction between the moving plate and the fixed electrode when the switch is closed. The DC switch comprises a plurality of dimples that are formed on the selective portion of the moving plate and are positioned to come into contact with the fixed electrode when the switch is closed so as to increase the contact force and lower the resistance between the moving plate and fixed electrode.

Micro-electro mechanical switch designs

A reconfigurable antenna is presented that uses MEMs shutters to reconfigure a Fresnel zone plate antenna. It can be used to either point a main beam in different directions or to point multiple beams in different directions.

Reconfigurable antennas using microelectromechanical (MEMs) shutters and methods to utilize such

An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.

Rolling shutter optical switch device with latch electrode and slits in shutter

Rolling shutter optical switch device with dimples on shutter, annular rim at optical port and shortened shutter attachment edge

A microelectro-mechanical device which includes a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode. The device includes first and second electrically conductive regions which are isolated from one another by the fixed electrode. The moveable electrode moves to cover the fixed electrode and to electrically couple to the second conductive region, thus electrically coupling the first and second conductive regions, in response to a potential being applied across the fixed and moveable electrodes. The fixed electrode is transparent to electromagnetic signals or waves and the moveable electrode impedes or allows transmission of electromagnetic signals or waves.

Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same

A microelectro-mechanical device which includes a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode. The device includes first and second electrically conductive regions which are isolated from one another by the fixed electrode. The moveable electrode moves to cover the fixed electrode and to electrically couple to the second conductive region, thus electrically coupling the first and second conductive regions, in response to a potential being applied across the fixed and moveable electrodes. The fixed electrode is transparent to electromagnetic signals or waves and the moveable electrode impedes or allows transmission of electromagnetic signals or waves. In one embodiment of the invention, the fixed and moveable electrodes are configured within an array of similar devices, and each device or groups of devices in the array are individually addressable to actuate the moveable electrodes. In another embodiment of the invention, there is provided a reconfigurable circuit including an array of actuatable devices which are addressed individually or in selected groups, each of the actuatable devices having a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode.

Microelectro-mechanical system actuator device and reconfigurable

A spatial light modulator formed of a moveable electrode which is disposed opposite a fixed electrode and is biased to roll in a preferred direction upon application of an electric field across the electrodes to produce a light valve or light shutter. In one embodiment, the moveable electrode is restrained at one end and coils about the fixed end in a preferential roll direction. The bias is achieved by inducing anisotropic stress or anisotropic stiffness.

Spatial light modulator

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Waltham, MA, United States of America

Carl O Bozler