Veeco Instruments Inc.

Bruker Nano Gmbh

Carl Masser

Nghi Phan

Johannes Kindt

Henry Mittel

Jeff Markakis

A scanning probe microscope (SPM) has a piezoelectric actuator-based tube scanner to which a probe is attached and which is moveable in three planes by the application of a voltage to the piezoelectric tube. A set of flexures flex with the displacement of the tube and strain gauges attached to the flexures measure the flex of the flexures to provide feedback as to the displacement of the tube during the scanning of an object. The strain gauges and flexures form a kinematic sensing frame or arrangement in which a single constraint is provided for each degree of freedom and in which the constraints are at least substantially orthogonal to one another.

Scanning probe microscope having support stage incorporating a kinematic flexure arrangement

A scanner for a scanning probe microscope (SPM) including a head has a scanner body that houses an actuator, and a sensor that detects scanner movement. The scanner body is removable from the head by hand and without the use of tools and has a total volume of less than about five (5) square inches. Provisions are made for insuring that movement of a probe device coupled to the scanner is restricted to be substantially only in the intended direction. A fundamental resonance frequency for the scanner can be greater than 10 kHz.

Scanning probe microscope with compact scanner

A low voltage signal amplifying apparatus includes a probe device, an actuator providing relative motion between the probe device and the sample, and a transducer that generates a voltage signal indicative of a property of at least one of the probe device, the sample, and the actuator. A differential voltage to current converter receives a differential voltage signal from the transducer and generates a differential current signal to provide a balanced, differential, low impedance current mode amplified signal that can be readily carried over a signal transmission device.

Apparatus and method of amplifying low voltage signals

A method and apparatus are provided for monitoring motion of a scanning probe microscope (SPM) actuator using an improved optical displacement sensor (ODS) including a light emitter, an intensifier, and a photodetector. One of these three devices, most preferably the intensifier, is preferably movable with the actuator and relative to the other two devices. The intensifier intensifies the light incident on the detecting face of the photodetector, increasing the sensitivity of the ODS and improving the ability of the SPM to translate the actuator in the desired manner. The photodetector preferably is a split diode or a quad diode photodetector. The light emitter includes at least a light source such as an LED and may additionally include an aperture that limits the light passing therethrough to that which contributes to the displacement signal, thereby reducing shot noise and increasing the signal-to-noise ratio.

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Santa Barbara, CA, United States of America

Carl Masser