Helix Technology Corporation

Carl H Geden

Stephen J Yamartino

Brett W Allen

The present invention provides a cryopump coupled to a gate valve in which the gate valve is automatically prevented from being opened during unsafe conditions, for example, when combustible gases such as hydrogen may be present in the cryopump, but may be operated during safe conditions. A method of controlling the gate valve includes automatically determining with a controller whether the cryopump is operating in one of safe and unsafe conditions. The unsafe conditions are situations where combustible gas may be present in the cryopump and may be correlated to parameters of the cryopump including operational modes of the cryopump, and sensed parameters. The gate valve is automatically controlled with the controller based on the determination of safe and unsafe conditions. The gate valve is automatically locked closed during unsafe conditions and remains locked until the unsafe conditions are removed. The gate valve is automatically unlocked after the unsafe conditions change to safe conditions where the gate valve is freely operable.

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N. Attleboro, MA, United States of America

Carl H Geden