Evonik Degussa Gmbh

Evonik Industries Ag

Carl-Friedrich Hoppe

Hartwig Rauleder

Christian Goetz

Ingrid Lunt-Rieg

Goswin Uehlenbruck

Christian GÖTZ

Hartwig Raudeler

The present invention relates to a specific process for producing trisilylamine from monochlorosilane and ammonia in the liquid phase. The invention further relates to a plant in which such a process can be carried out with advantage.

Process for the preparation of trisilylamine from monochlorosilane and ammonia

The present invention relates to a specific process for producing trisilylamine from monochlorosilane and ammonia in the liquid phase. The invention further relates to a plant wherein such a process can be carried out with advantage.

Production of trisilylamine from monochlorosilane and ammonia by use of inert solvent

The invention relates to a process for preparing trisilylamine and polysilazanes in the liquid phase, in which ammonia is introduced in a superstoichiometric amount relative to 5 monochlorosilane which is present in an inert solvent. Here, a reaction in which trisilylamine and polysilazanes are formed proceeds. TSA is subsequently separated off in gaseous form from the product mixture. The TSA obtained is purified by filtration and distillation and obtained in high or very high purity. The bottom product mixture is conveyed from the reactor through a filter unit in which solid ammonium chloride is separated off to give a liquid mixture of polysilazanes and solvent. This is fed to a further distillation to recover solvent. As a result of the NHbeing introduced in a superstoichiometric amount relative to monochlorosilane, monochlorosilane is completely reacted in the reactor. This completely prevents the reaction of monochlorosilane with additional disilylamine formed in small amounts to form solid ammonium chloride in the downstream plant parts for purification of the TSA. The solutions filtered downstream of the reactor are accordingly completely free of solids.

Process for the coupled preparation of trisilylamine and polysilazanes having a molar mass of up to 500 g/mol

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Gruendau, Germany

Carl-Friedrich Hoppe