The United States of America As Represented by the Administrator

Carl B Mattson

Christian J Schwindt

Paul A Mogan

A system and method for detecting and quantizing particle fallout contamination particles which are collected on a transparent disk or other surface employs an optical detector, such as a CCD camera, to obtain images of the disk, and a computer for analyzing the images. From the images, the computer detects, counts and sizes particles collected on the disk. The computer also determines, through comparison to previously analyzed images, the particle fallout rate, and generates an alarm or other indication if the rate exceeds a maximum allowable value. The detector and disk are disposed in a housing having an aperture formed therein for defining the area on the surface of the disk which is exposed to the particle fallout. A light source is provided for evenly illuminating the disk. A first drive motor slowly rotates the disk to increase the amount of its surface area which is exposed through the aperture to the particle fallout. A second motor is also provided for incrementally scanning the disk in a radial direction back and forth over the camera so that the camera eventually obtains images of the entire surface of the disk which is exposed to the particle fallout.

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Titusville, FL, United States of America

Carl B Mattson