Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

California Institute of Technology

Carine Marcoux

Eric Ollier

Michael Roukes

Laurent Duraffourg

Sebastien Hentz

Philippe Andreucci

Frederic-Xavier Gaillard

Sébastien Hentz

Edward B Myers

Frédéric-Xavier Gaillard

Pierre Brianceau

Stephane Minoret

Stéphane Minoret

A process for making at least one porous area (ZP) of a microelectronic structure in at least one part of an conducting active layer (), the active layer () forming a front face of a stack, the stack comprising a back face () of conducting material and an insulating layer () interposed between the active layer () and the back face (), said process comprising the steps of:

Process for electrochemically making at least one porous area of a micro and/or nanoelectronic structure

A device comprising a substrate comprising at least one microelectronic and/or nanoelectronic structure comprising at least one sensitive portion and one fluid channel () defined between said substrate and a cap (), where said fluid channel () comprises at least two apertures to provide a flow in said channel, where said microelectronic and/or nanoelectronic structure is located within the fluid channel, where said cap is assembled with the substrate at an assembly interface, where said device comprises electrical connections between said microelectronic and/or nanoelectronic structure and the exterior of the fluid channel (), where said electrical connections () are formed by vias made through the substrate () directly below the microelectronic and/or nanoelectronic structure, and in electrical contact with said microelectronic and/or nanoelectronic structure.

Device comprising a fluid channel fitted with at least one microelectronic or nanoelectronic system, and method for manufacturing such a device

Device including a substrate including at least one microelectronic and/or nanoelectronic structure (NEMS) having a sensitive portion and a fluid channel. The fluid channel includes two lateral walls, an upper wall connecting the two lateral walls, a lower wall formed by the substrate, and at least two openings in order to provide a circulation in the fluid channel, with the openings being defined between the two lateral walls, with the structure being located inside the fluid channel. Electrical connection lines extend between the structure and the outside of the fluid channel, with the connection lines being carried out on the substrate and passing under the lateral walls. The device also includes an intermediate layer having a planar face in contact with base faces of said lateral walls. The connection lines are at least partially covered by the intermediate layer at least immediately above base faces of the lateral walls. The lateral walls are made sealingly integral on the substrate by a sealing layer on the intermediate layer.

Device comprising a fluid channel provided with at least one micro or nanoelectronic system and method for carrying out such a device

A nano electro-mechanical system (NEMS) formed on a substrate is provided including at least one fixed part associated with the substrate and at least one movable part in relation to the substrate, the system including a transduction component configured to excite the movable part to confer on it a movement and/or to detect a movement of the movable part, the transduction component including at least one electrically conductive material. The electrically conductive material is made of an AlSi alloy based deposition, the deposition being supported at least in part by the movable part of the system.

NEMS comprising AlSi alloy based transducer

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Voiron, France

Carine Marcoux