Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Centre National De La Recherche Scientifique

Apix Analytics

Carine Ladner

Thomas Alava

Guillaume Jourdan

Eric Colinet

Eric Ollier

Sébastien Hentz

Bruno Fain

Nicolas Roch

Julien Renard

Kazi Rafsanjani Amin

Kévin Benedetto

An electromechanical conversion device includes a resonant electrical circuit comprising an inductance and a capacitor, the capacitor including at least a first electrode and a second electrode; and a mechanical oscillator including at least one microbeam formed in a membrane, the first and second electrodes being located side by side and the first electrode of the capacitor being located on a face of the microbeam so that the electrical capacitance of the capacitor varies when the mechanical oscillator oscillates; device wherein the inductance includes an electric track of very low thickness made on the membrane and made of a superconductive material chosen so as to obtain an electric track with a high kinetic inductance.

Electromechanical conversion device and system using such a device

Thermal flux sensor with heating nanofilaments

Method of fabricating a microelectromechanical structure et comprising two elements suspended from a support, a cavity made in the support, said cavity having two different depths, including:

Method of fabricating a MEMS and/or NEMS structure comprising at least two elements suspended from a support at different distances from said support

Growing community of inventors

Voiron, France

Carine Ladner