Carl Zeiss Microscopy Gmbh

Carl Zeiss Nts Gmbh

Camille Stebler

Emmerich Bertagnolli

Alexander Rosenthal

Ulrike Zeile

Wolfram Buehler

Heinz Wanzenboeck

Wolfram Buhler

Holger Dömer

Wolfram Bühler

Heinz Wanzenbock

Elke Haustein

Heinz Wanzenböck

Producing images of a specimen includes introducing a specimen into a specimen chamber of a particle-beam device, selecting a specific position on the surface of the specimen, supplying a contrast-agent precursor on the specific position, providing a particle beam and/or a light beam, guiding the particle beam and/or the light beam onto the specific position, applying a contrast-agent layer to the specific position as a result of the interaction of the particle beam and/or the light beam with the contrast-agent precursor, leaving the contrast-agent layer on the surface of the specimen for a predetermined amount of time. During the predetermined amount of time, a first part of the contrast-agent layer diffuses into the specimen and a second part of the contrast-agent layer remains on the surface of the specimen. The specimen is imaged using an optical device and/or a particle-optical device and/or using the particle beam.

Producing images of a specimen

A processing system for processing an object () is provided, wherein the processing system is adapted, to focus a first energy beam, in particular an electron beam (), and a second energy beam, in particular an ion beam (), on a focusing region () in which a object () to be processed is arrangeable. A processing chamber wall () having two openings () for traversal of both energy beams and a connector () for supplying process gas delimits a processing chamber () from a vacuum chamber () of the processing system. Processing the object by activating the process gas through one of the energy beams and inspecting the object via one of the energy beams is enabled for different orientations of the object relative to a propagation direction of one of the energy beams.

Processing system

A processing system comprises a gas supply apparatus with which process gas is supplied to an object. An activation beam activates the gas thereby inducing a chemical reaction between material at the surface of the object and the process gas causing ablation of material from the surface or deposition of material at the surface. The gas supply apparatus is formed from a stack of plates providing a gas conduit system between at least one gas inlet and at least one gas outlet.

System for processing an object

Growing community of inventors

Fehren, Switzerland

Camille Stebler