Electro Scientific Industries, Inc.

Callian Cillian O'Briain Fallon

Kali Dunne

A method of laser machining a feature in a substrate includes machining the substrate with a pulsed laser along a scan line so that the successive pulsesat the substrate do not overlap but are either contiguous or spaced apart. Pulsesin respective succeeding scans of the laser along the scan line, are offset with respect to the starting point of pulsesin a previous scan so that multiple successive laser scans provide machining to a required depth while successively smoothing edges,of the feature with each pass.

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Malahide, Ireland

Callian Cillian O'Briain Fallon