Average Co-Inventor Count = 5.29
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Entegris, Inc. (3 from 784 patents)
3 patents:
1. 12444636 - Electrostatic chuck with a charge dissipation structure
2. 11837492 - Electrostatic chuck having a gas flow feature, and related methods
3. 11612972 - Electrostatic chuck with embossments that comprise diamond-like carbon and deposited silicon-based material, and related methods