Watlow Electric Manufacturing Company

Cal Thomas Swanson

Philip Steven Schmidt

Louis P Steinhauser

Kevin Ptasienski

Sanhong Zhang

Kevin Smith

Jacob Robert Lindley

Mohammad Nosrati

Allen Norman Boldt

Dennis Stanley Grimard

Mark Denis Everly

John Frederic Lemke

Kevin Robert Smith

David P Culbertson

Jeremy Ohse

Jeremy J Quandt

James N Pradun

Mark Hoven

Mark L G Hoven

Ray Alan Derler

Jeffrey Reiman

Phillip S Schmidt

Michael Stewart

Oscar Ramirez

Janet Lea Smith

Mike Stewart

Chris Lanham

Tom Kupiszewski

Allen Boldt

Jacob Lindley

Kevin R Smith

Dennis Grimard

Louis Steinhauser

A control system for use in a fluid flow application includes a heater and a control device. The heater includes at least one resistive heating element having a relationship between resistance and temperature defining a non-monotonic curve. The heater is to heat fluid flow. The control device is to determine a flow characteristic of the fluid flow and a temperature of the at least one resistive heating element along the non-monotonic curve between resistance and temperature based on a change in resistance of the at least one resistive heating element.

Dual-purpose heater and fluid flow measurement system

A control system for use in a fluid flow application includes a heater and a control device. The heater has at least one resistive heating element and the heater is operable to heat fluid. The control device determines at least one flow characteristic of a fluid flow based on a heat loss of the at least one resistive heating element and determines a mass flow rate of the fluid based on the at least one flow characteristic and a property of the at least one resistive heating element. And the property of the at least one resistive heating element includes a change in resistance of the at least one resistive heating element under a given heat flux density.

A thermal system includes a base member, a two-phase fluid, a tuning heater, and a chuck. The base member includes at least one fluid passageway. The two-phase fluid is disposed within the fluid passageway. A pressure of the two-phase fluid is controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. The tuning heater is secured to the base member. The chuck is secured to the tuning heater opposite to the base member. The tuning heater includes a plurality of zones to fine tune a heat distribution provided by the base member to the chuck.

High definition heater system having a fluid medium

The present disclosure relates to a sensing system that includes a plurality of resistive elements coupled to a plurality of nodes and a controller configured to index through a plurality of modes to measure an electrical characteristic for each resistive element. Each mode of the plurality of modes represents a different combination of power, return, or open circuit condition applied to each of the plurality of nodes. The controller is configured to calculate, for each of the modes, a total power consumed by the system and a power consumed by each of the resistive elements based on the measured electrical characteristics, to determine a physical parameter.

Multi-parallel sensor array system

The present disclosure relates to a sensing system and method that includes a plurality of resistive elements coupled to a plurality of nodes and a control system configured to index through a plurality of modes to measure an electrical characteristic for each resistive element. Each mode of the plurality of modes represents a different combination of power, return, or open circuit condition applied to each of the plurality of nodes, and the control system is configured to calculate, for each of the modes, a total power consumed by the system and a power consumed by each of the resistive elements based on the measured electrical characteristics, to determine a physical parameter.

A heater system is provided that includes a base functional layer having at least one functional zone. A substrate is secured to the functional member, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer provides lower power than the base functional layer. A component is secured to the tuning layer opposite the substrate, and the substrate defines a thermal conductivity to absorb and dissipate a requisite amount of power from the base functional layer. A control system is also provided that has a plurality of addressable control elements in electrical communication with power lines and with the tuning layer, the control elements providing selective control of the tuning layer zones.

High definition heater and method of operation

A control system for use in a fluid flow application is provided. The control system includes a heater having at least one resistive heating element. The heater is adapted to heat the fluid flow. The control system further includes a control device that uses heat loss from at least one resistive heating element to determine flow characteristics of the fluid flow.

A thermal system includes: a base member including at least one fluid passageway in which a two-phase fluid is disposed; a tuning layer secured to the base member; and a control system. The pressure of the two-phase fluid is controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. The tuning layer includes a plurality of zones. The control system includes a plurality of sets of power lines in communication with the tuning layer, and a plurality of addressable control elements in electrical communication with the power lines and with the tuning layer. The control elements provide selective control of the tuning layer zones.

The present disclosure provides a thermal system that includes an array of heating resistor circuits having first termination ends and second termination ends, and a plurality of nodes connected to the heating resistor circuits at the first and second termination ends. The thermal system further includes power wires to provide power to the heating resistor circuits and signal wires to sense a temperature of each of the heating resistor circuits. Each node is connected to a power wire and to a signal wire, and a number of heating resistor circuits is greater than or equal to a number of power wires and to a number of the signal wires.

Integrated heater and sensor system

A thermal system includes multiple thermal elements, multiple power lines, and a control system. Each of the thermal elements define a resistor and a current limiting device, and the thermal elements include at least a first subset of parallel thermal elements and at least a second subset of parallel thermal elements. The current limiting devices in a given subset of parallel thermal elements have opposite polarity from each other. The multiple power lines are connected to the plurality of thermal elements. The power lines are configured in pairs for providing power to the first subset and the second subset of parallel thermal elements. The control system is configured to selectively apply power to the first subset and the second subset of parallel thermal elements by way of the power lines.

Reduced wire count heater array block

A layered heater system is provided that includes an engineered substrate having an upper face sheet, a lower face sheet, and a core disposed between the upper face sheet and the lower face sheet. A dielectric layer is formed on at least one of the upper face sheet and the lower face sheet, a resistive element layer is formed on the dielectric layer, a protective layer is formed on the resistive element layer, and terminal pads are formed over at least a portion of the resistive element layer, wherein the terminal pads are exposed through the protective layer. In one form, the core defines a honeycomb structure, and in another, the core defines a frame structure having a plurality of support ribs.

Layered heater system with honeycomb core structure

Methods of manufacturing a heater are provided that generally include forming a laminate having a dielectric layer, a first double-sided adhesive dielectric layer, and a conductive layer. Next, a circuit pattern is created into the conductive layer, and then the circuit pattern is covered with a second double-sided adhesive dielectric layer. The second double-sided adhesive dielectric layer is covered with a sacrificial layer, and then the heater is formed, the heater comprising the dielectric layer, the first double-sided adhesive dielectric layer, the conductive layer, and the second double-sided adhesive dielectric layer. Subsequently, the sacrificial layer is removed.

Method of manufacturing a high definition heater system

An apparatus is provided, by way of example, a heater for use in semiconductor processing equipment, that includes a base functional layer having at least one functional zone. A substrate is secured to the base functional layer, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer has lower power than the base functional layer. Further, a component, such as a chuck by way of example, is secured to the tuning layer opposite the substrate. The substrate defines a thermal conductivity to dissipate a requisite amount of power from the base functional layer.

A thermal array system is provided. The system includes a first thermal element and a second thermal element connected between a first node and a second node. The first thermal element being activated and the second thermal element being deactivated by a first polarity of the first node relative to the second node. Further, the first thermal element being deactivated and the second thermal element being activated by a second polarity of the first node relative to the second node.

Thermal array system

A thermal system includes a plurality of resistor circuits that define a number of resistor circuits R. The thermal system also has a plurality of nodes that connect the plurality of resistor circuits and define a number of nodes N. A plurality of power wires are connected to each of the plurality of nodes, and the plurality of power wires define a number of power wires P. A plurality of signal wires connect to each of the plurality of nodes to sense the temperature of each of the resistor circuits, and the plurality of signal wires define a number of signal wires S. The number of power wires Pand the number of signal wires Sis equal to the number of nodes N, and the number of resistor circuits Ris greater than or equal to the number of nodes N.

Growing community of inventors

St. Louis, MO, United States of America

Cal Thomas Swanson