Air Products and Chemicals, Inc.

Symyx Technologies, Inc.

Freeslate, Inc.

C Eric Ramberg

Scott Jeffrey Weigel

Martin Devenney

John F Kirner

Brian Keith Peterson

James Edward MacDougall

Konstantinos Chondroudis

Keith Cendak

Youqi Wang

Thomas Albert Braymer

Keith Douglas Campbell

Marco Falcioni

Stephen J Turner

Thomas Alan Deis

Lisa Deis

Lisa Deis, Legal Representative

Computer-implemented methods, systems and apparatus, including computer program apparatus, provide techniques for designing a set of experiments to be performed with a set of resources. A plurality of experimental configurations are generated based on a set of parameters describing factors to be varied in the experiments and a set of constraints representing limitations on operations that can be performed with the set of resources. A set of experiments is defined based on a selected configuration. The constraints can be represented as patterns defining an application of a parameter to a set of one or more points of an experimental lattice.

Methods and apparatus for preparing high-dimensional combinatorial experiments

Low dielectric materials and films comprising same have been identified for improved performance when used as performance materials, for example, in interlevel dielectrics integrated circuits as well as methods for making same. In one aspect of the present invention, the performance of the dielectric material may be improved by controlling the weight percentage of ethylene oxide groups in the at least one porogen.

Compositions for preparing low dielectric materials

Low dielectric materials and films comprising same have been identified for improved performance when used as interlevel dielectrics in integrated circuits as well as methods for making same. These materials are characterized as having a dielectric constant (&#x3ba;) a dielectric constant of about 3.7 or less; a normalized wall elastic modulus (E'), derived in part from the dielectric constant of the material, of about 15 GPa or greater; and a metal impurity level of about 500 ppm or less. Low dielectric materials are also disclosed having a dielectric constant of less than about 1.95 and a normalized wall elastic modulus (E&#x2032;), derived in part from the dielectric constant of the material, of greater than about 26 GPa.

Low dielectric materials and methods for making same

Methods and apparatus, including computer program apparatus, implementing techniques for designing sets of combinatorial experiments. A set of experimental parameters, sampling patterns, and constraints defines a set of experiments that is limited to a volume of a hyperspace defined by the set of experimental parameters. Parameters can be grouped by type such that grouped parameters are constrained to perform a common role in the set of experiments. The practicability of the experiment design can be estimated based on the number of experiments in the set of experiments. The experiment design can be used to prepare one or more combinatorial libraries.

Combinatorial parameter space experiment design

The present invention is directed to a method for depositing a radial profile of a target material onto a substrate. The method comprises directing one or more target materials toward a substrate, blocking some predetermined portion of the target material with at least a first shutter so that it does not strike the substrate, and rotating the substrate relative to the first shutter while the target material is directed toward the substrate so that a radial profile is formed on the substrate. In on embodiment, the substrate is rotated, and the first shutter does not rotate. In another embodiment, the first shutter rotates and the substrate does not rotate. The method permits a radial thickness or composition gradient on the substrate to be formed. The method may also include using one or more contact masks placed on the substrate during the deposition in order to mask off particular portions of the substrate during the deposition process.

Method for creating radial profiles on a substrate

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San Jose, CA, United States of America

C Eric Ramberg