Samsung Electronics Co., Ltd.

Korea Advanced Institute of Science and Technology

Fine Semitech Corp.

Sungkyunkwan University

Byungchul Yoo

Mun Ja Kim

Hojun Shim

Haeshin Lee

Jaegeun Park

Sangmuk Hwang

Jeonghwan Min

Myungjun Kim

Kyoungchae Seo

Yunhan Lee

Chang Young Jeong

Jikang Kim

Byunghoon Lee

Sungyong Cho

Changyoung Jeong

Jaehyuck Choi

Sunghoon Park

Han-Shin Lee

Jihoon Na

Jibeom Yoo

Jaewhan Sung

Hyunjune Cho

Jeongsu Yang

Donghoon Chung

Hakseok Lee

Myeongjin Jeong

Ikjun Kim

An adhesive composition, a method for preparing the same, a reticle assembly including the same, and a method for fabricating the reticle assembly including the same are provided. The adhesive composition includes a polyphenol compound including tannic acid, a polymer including polyvinyl alcohol, and a solvent including water and alcohol.

Adhesive composition, method for preparing the same, reticle assembly including the same, and method for fabricating reticle assembly including the same

An adhesive for an EUV mask includes an epoxy resin composition in an amount of 50 wt % to 80 wt % based on a total weight of the adhesive, the epoxy resin composition including an epoxy resin, a hardener, a toughening agent, a filler, and a curing accelerator, and an inorganic filler in an amount of 20 wt % to 50 wt % based on the total weight of the adhesive, the inorganic filler including one or more of aluminum hydroxide or calcium carbonate.

Method of removing an adhesive for an EUV mask and method of reusing an EUV mask

A storage controller includes a command manager and a direct memory access (DMA) engine. The command manager receives a first submission queue doorbell from an external device, fetches a first command including a first latency from the external device in response to the first submission queue doorbell, and determines a first timing to write a first completion into the external device based on the first latency, the first completion indicating that the first command is completely processed. The DMA engine receives a request signal requesting processing of the first command from the command manager, transfer data, which the first command requests, based on a DMA transfer in response to the request signal, and outputs a complete signal, which indicates that the first command is completely processed, to the command manager.

Storage controller managing completion timing, and operating method thereof

A stud attachment device for attaching a plurality of studs to a photomask constituting a reticle. The stud attachment device including a body; a plurality of holders extending from the body, the holders allowing the studs to be laid thereon, respectively; and a pressure regulator for independently controlling pressures of the holders when the studs are attached to the photomask.

Stud attachment device and stud attachment method with independent temperature/pressure control

An apparatus for generating extreme ultraviolet (EUV) light includes a raw material supply unit supplying a plasma source for generating EUV light. An EUV light source unit uses a laser to generate plasma from the plasma source. A filter is configured to extract EUV light from the light. A first protective layer is disposed on a front surface of the filter. A frame having a first region exposing at least a portion of the filter or the first protective layer is disposed on the first protective layer. A width of the first region is smaller than a width of the first protective layer and smaller than or equal to a width of the filter.

Apparatus for generating extreme ultraviolet (EUV), method of manufacturing the same, and EUV system

A method of operating a storage controller that communicates with a host including a submission queue and a completion queue is provided. The operating method includes receiving a submission queue doorbell from the host, fetching a first command including a latency from the submission queue of the host in response to the received submission queue doorbell, processing the fetched first command, and writing a first completion, which indicates that the first command is completely processed, into the completion queue of the host at a timing based on the latency.

A pellicle including a water-soluble adhesive and a photomask assembly including the pellicle are provided. A pellicle may include a membrane, a pellicle frame, and a water-soluble adhesive disposed on the pellicle frame. The water-soluble adhesive may be prepared by a mixture including a water-soluble acrylic adhesive material in an amount of about 40% to about 55% by weight of the mixture, water or a solution of water and alcohol in an amount of about 40% to about 55% by weight of the mixture, and an additive in an amount of about 1% to about 5% by weight of the mixture.

Pellicle including a water-soluble adhesive and photomask assembly including the pellicle

Growing community of inventors

Yongin-si, South Korea

Byungchul Yoo