Lg Display Co., Ltd.

Other

Lg Philips Lcd Co., Inc.

Byung-Yong Ahn

Ki-Sul Cho

Young-Seok Choi

Tae-Ung Hwang

Dong-Jun Min

Bo-Kyoung Jung

Kyo-Ho Moon

Yong-Soo Cho

Chul-Tae Kim

Seung-Woo Jeong

Hee-Kyoung Choi

Sung-Wook Hong

An array substrate for a display device and its fabrication method are disclosed. The array substrate for a display device includes: a gate wiring and a gate electrode connected to the wiring formed on a substrate; a gate insulating layer formed on the gate electrode; an active layer and a barrier metal layer stacked with the gate insulating layer interposed therebetween on the gate electrode; a data wiring formed on the barrier metal layer and source and electrodes connected to the data wiring; a passivation film formed on the source and drain electrodes and the data wiring and having a contact hole exposing a portion of the drain electrode, the barrier metal layer and the active layer; and a pixel electrode formed on the passivation film and being in contact with the drain electrode and the barrier metal layer including the active layer.

Array substrate for display device and method for fabricating the same

Provided is an array substrate for an IPS-mode LCD device and method of fabricating the same that prevents a problem referred to as wavy noise. The IPS-mode LCD device and method have a shorter processing time and low error rate without an increase in fabrication and production costs.

Array substrate for IPS-mode LCD device being capable of preventing wavy noise

A method of manufacturing an array substrate for a liquid crystal display device includes forming a gate line, a gate pad, a gate electrode, and a data pad on a substrate through a first mask process, forming a gate insulating layer on a substantial part of an entire surface of the substrate including the gate line, the gate pad, the gate electrode, and the data pad, forming a data line, a source-drain pattern and an active layer on the gate insulating layer and forming a gate pad contact hole and a data pad contact hole in the gate insulating layer through a second mask process, and forming a pixel electrode, a gate pad terminal, a data pad terminal, a source electrode, a drain electrode, and an ohmic contact layer through a third mask process.

Array substrate for liquid crystal display device and fabricating method of the same

Method of fabricating array substrate for IPS-mode LCD device has a shorter processing time and low error rate without an increase in fabrication and production costs

A dry etching step during the manufacturing of a substrate for a liquid crystal display (LCD) device is improved by placing the substrate at a predetermined distance away from the lower electrode to prevent damage of the substrate due to electrostatic formed therebetween. An insulating tape attached on the lower electrode provides electrostatic protection between the substrate and the lower electrode, so that the substrate is properly lifted off the lower electrode via the lifting pins of the lower electrode without electrostatic interference.

Dry etching method and apparatus for use in the LCD device

Growing community of inventors

Dae-gu, South Korea

Byung-Yong Ahn