Skhynix Inc.

Hynix Semiconductor Inc.

Byung Wook Bae

Jung Ryul Ahn

Eun Seok Choi

Jeong Soo Kim

A semiconductor memory device includes a bit line, a common source pattern above the bit line, a channel layer in contact with the common source pattern, the channel layer extending toward the bit line, and a filling insulating layer disposed between the bit line and the common source pattern, the filling insulating layer surrounding a first part of the channel layer. The semiconductor memory device also includes a gate stack structure disposed between the bit line and the filling insulating layer, the gate stack structure surrounding a second part of the channel layer. The semiconductor memory device further includes a first etch stop pattern on a sidewall of the filling insulating layer, a second etch stop pattern between the first etch stop pattern and the filling insulating layer, and a memory pattern between the gate stack structure and the channel layer.

Semiconductor memory device and manufacturing method of semiconductor memory device

A memory device, and a method of testing the memory device for failure, includes a first chip including a memory cell array and a second chip overlapping with the first chip. The second chip includes: a semiconductor substrate including a peripheral circuit area and a lower test area; a plurality of sub-test pads and an input pad, disposed on the lower test area of the semiconductor substrate and spaced apart from each other; a plurality of sub-test circuits respectively connected to the plurality of sub-test pads; and a detection circuit connected to a plurality of terminals of the plurality of sub-test circuits, the detection circuit configured to output a detection signal changed according to a plurality of signals input from the plurality of terminals.

Memory device and method of testing the memory device for failure

There are provided a semiconductor memory device and a method of manufacturing the semiconductor memory device. The semiconductor memory device includes a gate stack comprising a plurality of first interlayer insulating patterns and a plurality of conductive patterns alternately stacked, a dummy stack comprising a plurality of second interlayer insulating patterns and a plurality of sacrificial insulating layers, a plurality of step-shaped grooves defined at different depths in the gate stack, a plurality of openings passing through the dummy stack and spaced apart from each other, a first gap-fill insulating pattern filling the plurality of step-shaped grooves, a second gap-fill insulating pattern filling the plurality of openings, a plurality of conductive gate contacts passing through the first gap-fill insulating pattern and connected to the plurality of conductive patterns, and a plurality of conductive peripheral circuit contacts passing through the second gap-fill insulating pattern.

Semiconductor memory device and method of manufacturing semiconductor memory device

A semiconductor device includes a semiconductor substrate configured to include a circuit pattern at one surface, an insulation film formed over a back surface of the semiconductor substrate, a through silicon via (TSV) configured to pass through the semiconductor substrate and the insulation film, and an oxide film formed at a sidewall of the TSV and protruded from the back surface of the semiconductor substrate in a manner that the oxide film partially contacts the insulation film.

Method for fabricating semiconductor device having through silicon via

A semiconductor device includes a semiconductor substrate having two surfaces. First side faces second side and includes recesses, and a plurality of through silicon vias (TSV), which penetrate through the semiconductor substrate, are exposed by the recesses. Even when the TSVs have different heights from each other or the degree of back-grinding is changed, due to a process parameters, yield of the semiconductor device is improved by reducing failure caused when a TSV is not exposed.

Semiconductor device and method for manufacturing the same

A semiconductor device can detect a defective or faulty part caused by copper (Cu) ions migrated from a through silicon via (TSV), resulting in improvement of device characteristics and reliability. The semiconductor device includes: a semiconductor substrate including an active region defined by a device isolation region; a through silicon via (TSV) formed to pass through the semiconductor substrate; and a test unit formed in the vicinity of the TSV so as to determine the presence or absence of metal pollution caused by the TSV.

Semiconductor device having test unit, electronic apparatus having the same, and method for testing the semiconductor device

A semiconductor device is provided to check through silicon via (TSV) connectivity at a wafer level. The semiconductor device includes a first metal layer formed over a through silicon via (TSV), a second metal layer and a third metal layer formed at both sides of the first metal layer to be electrically coupled to the TSV, and a fourth metal layer formed over the first metal layer to be electrically coupled to the first metal layer.

Semiconductor device including a structure for screening connectivity of a TSV

A method for manufacturing a semiconductor device prevents a lower electrode from leaning, in a dip-out process of an interlayer insulation film forming a lower electrode. A conductive material of a lower electrode is used as a support layer instead of a conventional nitride film support layer. This prevents a crack from being generated in a nitride film support layer. A method for manufacturing the semiconductor device is also disclosed.

Method for manufacturing semiconductor device

A fuse used in a semiconductor memory device. The fuse is formed with a 'X' shape where one circuit may be connected simultaneously to a plurality of other circuits. As a result, a fuse region is reduced, and the cutting number is also decreased, thereby lowering the possibility of defects resulting from cutting errors.

Fuse of semiconductor memory device

The invention relates to a semiconductor device comprising a fuse that is implemented as a bar type pattern that forms a straight line instead of a pattern that is difficult to secure a manufacturing margin. A fuse block including a plurality of fuses comprises a plurality of first connection parts, each including a blowing area, a plurality of second connection parts, wherein the plurality of the second connection parts and the plurality of the corresponding first connection parts respectively form part of the fuse, and a common connection unit configured to electrically connect the plurality of the first connection parts and the plurality of the second connection parts.

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Icheon, South Korea

Byung Wook Bae