Samsung Electronics Co., Ltd.

Daewoo Electronics Co., Ltd.

Byung-kyu Lee

Du-hyun Lee

Woong Ko

Hoon-sang Oh

Jae-kwan Kim

Ki-yeon Yang

Jin-seung Sohn

Jin-Seung Sohn

Myoung-jae Lee

Yong-Su Kim

Chee-kheng Lim

Seong-yong Yoon

Kyung-jin Lee

Seung-bum Hong

Joo-Hyun Lee

Jae-Jin Lee

Jun Young Lee

Dong-Ki Min

Eun-Hyoung Cho

Myung-bok Lee

Hae-sung Kim

Sung-Dong Suh

No-yeol Park

Tae-hyo Lee

Young-hoon Im

An imprinting stamp and a nano-imprinting method using the imprinting stamp are provided. The imprinting stamp includes a first substrate; one or more field regions on the first substrate, the first substrate including nano-patterns; and a first dummy pattern region on the first substrate and adjacent to the field region, the dummy pattern region including first dummy patterns having greater dimensions than that of the nano-patterns, the first dummy patterns being a plurality of polygons, each of the polygons having a vertex pointing in a first direction proceeding from the field region toward the first dummy pattern region.

Imprinting stamp and nano-imprinting method using the same

A stamp includes a transparent body having an inner chamber containing an inlet/outlet tube configured to have a fluid injected and removed therefrom.

Stamp, method of fabricating the stamp, and imprint method using the same

A template system, and a nano-imprint method using the same, include a template having a nano-pattern and configured to transfer the nano-pattern to a resin material on a substrate, and a pressure controlling apparatus configured to change a pressure of the template with respect to the substrate according to an intensity of bubbles captured between the substrate and the template.

Template system and nano-imprint method using the same

A stamp includes at least one protrusion on a protrusion pattern, and an end portion of the at least one protrusion may have a non-planarized surface. The end portion of the protrusion may have a concave structure, that is, the end portion includes a center region and an edge region, and the edge region is higher than the center region.

Stamp, method of manufacturing the same, and imprinting method using the stamp

Methods of manufacturing a nanoimprint stamp are provided. The method may include forming a pattern on a surface of a master substrate, depositing an etch barrier layer on a surface of a stamp substrate, coating a photoresist on one of the surfaces of the master substrate and the stamp substrate on which an etch barrier layer is formed, forming a photoresist pattern by pressing the master substrate against the stamp substrate, forming a hard mask by etching the etch barrier layer using the photoresist pattern, and etching the stamp substrate using the hard mask as an etch mask.

Method of manufacturing nanoimprint stamp

A cross point memory array includes a structure in which holes are formed in an insulating layer and a storage node is formed in each of the holes. The storage node may include a memory resistor and a switching structure. The master for an imprint process used to form the cross-point memory array includes various pattern shapes, and the method of manufacturing the master uses various etching methods.

Cross point memory arrays, methods of manufacturing the same, masters for imprint processes, and methods of manufacturing masters

A method of fabricating a nanoimprint stamp includes forming a resist pattern having a nano size width on a stamp substrate by performing imprint processes repeatedly. In the imprint processes, resist layers that are selectively etched are sequentially used. The stamp substrate is etched using the resist pattern as an etch mask.

Methods of fabricating nanoimprint stamp

Provided are a magnetic recording medium and a method of manufacturing the magnetic recording medium. The magnetic recording medium includes a substrate, a soft magnetic underlayer formed on the substrate, a texturing layer formed on the soft magnetic underlayer and including a uniform pattern, and a recording layer including magnetic grains and a non-magnetic boundary region isolating the magnetic grains. The magnetic grains and the non-magnetic boundary region of the recording layer are formed into a regular granular structure by segregation according to the regular pattern of the texturing layer. Therefore, a regular granular structure can be formed in the recording layer without a process such as etching of the recording layer, so that the recording density of the magnetic recording medium can be largely improved.

Magnetic recording medium and method of manufacturing the same

A patterned magnetic recording medium including a plurality of magnetic recording domains arranged at predetermined regular intervals on a substrate, wherein the magnetic recording domains are multi-layered and comprise a soft magnetic layer interposed between a first ferromagnetic layer and a second ferromagnetic layer. The soft magnetic layer suppresses magnetic interaction between a respective one of the magnetic recording domains and neighboring ones of the magnetic recording domains.

Patterned magnetic recording medium having reduced magnetic interaction between neighboring magnetic recording layers

A patterned medium and a method of manufacturing the same are provided. The patterned medium includes a data region having a plurality of recording dots arrayed along a plurality of tracks; and a non-data region comprising a part of the patterned medium other than the data region, the non-data region having a plurality of pattern marks. The method includes depositing an aluminum layer on a base substrate; depositing a photo-resist on the aluminum layer; forming a pattern on the photo-resist using a lithography process; forming a fine pattern by forming a plurality of cavities on a portion of the aluminum layer which is exposed through the photo-resist; removing the photo-resist; forming a mold pattern; imprinting the mold pattern on a media substrate to form cavities on the media substrate; and filling the cavities with a recording material.

Patterned medium and method of manufacturing the same

Provided are a bit patterned medium having a super track, a reading head which reads data recorded on the bit-patterned medium, and a hard disk drive (HDD) for recording/reading data on/from the bit patterned medium. The bit patterned medium includes a substrate, and a recording layer formed with a plurality of bit cells separated from each other along a plurality of tracks forming concentric circles having different radii on the substrate, wherein each track includes a super track including a plurality of sub-tracks, and bit cells formed on one of the sub-tracks are arranged at different positions in a circumference direction of the recording layer to bit cells formed on adjacent sub-tracks. The reading head which reads data recorded on a bit patterned medium has a width in a cross-track direction sufficient for reading data of an equal number of bit cells as the plurality of sub-tracks.

Bit patterned medium, reading head for reading data recorded on bit patterned medium, and hard disk drive for recording/reading data on/from bit patterned medium

A heat-assisted magnetic recording head (HAMR) head includes a magnetic recording head including a recording pole for applying a magnetic recording field on a magnetic recording medium and a return pole magnetically connected to the recording pole to form a magnetic path, a light source for emitting light, and an optical transmission module including an photonic crystal waveguide disposed at a side of the magnetic recording head to guide light incident from the light source and a nano aperture for enhancing an optical field by varying an intensity distribution of the light guided through the photonic crystal waveguide.

Heat-assisted magnetic recording head and method of manufacturing the same

A recording medium including a perpendicular magnetic recording layer and a laminated SUL formed on a substrate is provided. The SUL includes an antiferromagnetic layer interposed between laminated structures including a magnetic layer, a non-magnetic layer and a magnetic layer. The layers may each have a thickness of 20 nm or less and the layers below the antiferromagnetic layer may be thinner than the layers on the antiferromagnetic layer. The laminated structures formed on and below the antiferromagnetic layer have unidirectional magnetic anisotropies set in the opposite radial direction to each other by an exchange bias. As a result, media magnetic domain noise can be diminished.

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Seoul, South Korea

Byung-kyu Lee