Applied Materials, Inc.

Byung Ik Song

Kwangduk Douglas Lee

Prashant Kumar Kulshreshtha

Venkata Sharat Chandra Parimi

Xiaoquan Min

Hyung Je Woo

Exemplary methods of semiconductor processing may include forming a silicon oxide material on exposed surfaces of a processing region of a semiconductor processing chamber. The methods may include forming a silicon nitride material overlying the silicon oxide material. The methods may include performing a deposition process on a semiconductor substrate disposed within the processing region of the semiconductor processing chamber. The methods may include performing a chamber cleaning process.

Growing community of inventors

Yongin-si, South Korea

Byung Ik Song