Samsung Electro-mechanics Co., Ltd.

Wisol Co., Ltd.

Inktec Co., Inc.

Byung Hun Kim

Jong Hyeon Park

Ji Hoon Yoo

Yong Hun Ko

Kwang-Choon Chung

Hwa Sun Lee

Hyun Ho Shin

Kwang Choon Chung

Jae Chang Lee

Su Han Kim

Tah Joon Park

Tae Kyung Lee

Seung Mo Lim

Won Chul Sim

Won Tae Choi

Hyun Seok Lee

Joo Young Ha

Hyun-Nam Cho

Bong Soon Kang

Seung Joo Shin

Kyung Rin Kim

Nam-Boo Cho

Jong Beom Kim

Joonki Seong

Nam Boo Cho

Myung-Bong Yoo

Myung Bong Yoo

Su-Han Kim

A Young Moon

Hoan Jun Choi

Yi Sup Han

Hyoung Woo Kim

Na Rae Park

Chang Kyu Yoon

Disclosed is an acoustic resonator including a substrate including a first cavity, a first electrode formed above the substrate, a piezoelectric layer formed on one surface of the first electrode, and a second electrode formed on one surface of the piezoelectric layer. Here, the piezoelectric layer includes a longitudinal section not to cover a longitudinal section of the first electrode. Also, the second electrode covers the longitudinal section of the piezoelectric layer and extends to a first interpolar cavity which spaces the first electrode at least partially apart from the piezoelectric layer. A quality factor may be increased by fixing an increase in resistance which occurs due to thin film electrodes.

Acoustic resonator

Provided is an acoustic resonator including: a substrate including a first cavity; a first electrode formed above the substrate; a piezoelectric layer formed on one surface of the first electrode; and a second electrode formed on one surface of the piezoelectric layer, wherein the first electrode and the piezoelectric layer include an overlapping area that corresponds to a first end and a second end of the first cavity, the first electrode has a termination surface formed as an inclined surface of a first acute angle θoutside the overlapping area with respect to the second end of the first cavity, the piezoelectric layer is formed to include a first air bridge area that has a second cavity and is formed between the piezoelectric layer and the first electrode in a vertical direction and between the second end of the first cavity and the termination surface in a horizontal direction.

An air-gap type film bulk acoustic resonator (FBAR) according to the present invention may include: a substrate comprising an air gap portion on an upper surface thereof; a lower electrode formed on the substrate; a piezoelectric layer formed on the lower electrode; an upper electrode formed on the piezoelectric layer; a protective layer formed on the upper electrode; and a beam structure extended in a dome shape from one side of the upper electrode to define a space portion between the upper electrode and the piezoelectric layer, wherein one end of the beam structure is in contact with the piezoelectric layer.

Air-gap type FBAR

Disclosed is an air-gap type film bulk acoustic resonator (FBAR) including a substrate including an air-gap portion on a top surface, a lower electrode having a polygonal plate shape above the substrate and configured to surround a top of the air-gap portion, a piezoelectric layer formed above the lower electrode, and an upper electrode formed above the piezoelectric layer. Here, the lower electrode includes an electrode non-deposited area formed between one side plate boundary surface of the polygonal plate and one side air-gap boundary surface of the air-gap portion to expose one part of a top of the air-gap portion.

Air-gap type film bulk acoustic resonator

An air-gap type film bulk acoustic resonator (FBAR) is provided. The air-gap type FBAR includes a substrate which comprises an air gap portion having a substrate cavity formed in a top surface, a lower electrode formed on the substrate, a piezoelectric layer which is formed on the lower electrode and has one side forming an edge portion in the vicinity of a virtual edge according to vertical projection of the air gap portion, an upper electrode formed on the piezoelectric layer, a first electrode frame which comprises an open ring structure in plane, the open ring structure surrounding a part of a periphery of the piezoelectric layer on the lower electrode, and a second electrode frame positioned on the upper electrode and adjacent to an open portion of the open ring structure.

Disclosed is an air-gap type film bulk acoustic resonator (FBAR) including a substrate including an air-gap portion with a top surface in which a substrate cavity is formed, a lower electrode formed above the substrate while surrounding the air-gap portion, a piezoelectric layer formed above the lower electrode, and an upper electrode formed above the piezoelectric layer corresponding to a virtual area formed according to a vertical projection of the air-gap portion. Here, the piezoelectric layer includes a void portion having a piezoelectric cavity between the lower electrode and the upper electrode, and the void portion is formed below an edge portion corresponding to an end part of the upper electrode.

The present invention relates to a method for fabricating blackened conductive patterns, which includes (i) forming a resist layer on a non-conductive substrate; (ii) forming fine pattern grooves in the resist layer using a laser beam; (iii) forming a mixture layer containing a conductive material and a blackening material in the fine pattern grooves; and (iv) removing the resist layer remained on the non-conductive substrate.

Method for fabricating blackened conductive patterns

Provided herein is a method for manufacturing a conductive transparent substrate, the method including forming a plurality of main electrodes on the substrate such that the main electrodes are distanced from one another; and forming a connecting electrode that electrically connects two or more main electrodes such that the plurality of main electrodes are grouped into a plurality of group electrodes that are electrically disconnected from one another, thereby producing a conductive transparent substrate with excellent transmittance in a process of high yield.

Conductive transparent substrate manufacturing method, and conductive transparent substrate

There is provided a piezoelectric actuator including: a piezoelectric member having a multilayer structure; an external electrode formed on an outer surface of the piezoelectric member; and an intermediate electrode formed between layers of the piezoelectric members and having an area smaller than that of the external electrode.

Piezoelectric actuator

Provided is an error detection apparatus of an inkjet printer head including: an amplification unit connected between a piezoelectric element, which applies pressure to an ink chamber, and a ground to amplify a voltage generated from the piezoelectric element; and a detection unit for detecting whether ink is normally ejected using the voltage amplified by the amplification unit. It is possible to detect whether the inkjet printer head abnormally ejects ink by sensing vibration after ejection of ink using the piezoelectric element.

Error detection apparatus of inkjet printer head and error detection method thereof

A device and a method for managing a piezo inkjet head. The device includes: a piezo actuator connected to an inkjet head to generate pressure; a driver that controls driving of the piezo actuator; a sensing resistor connected between the driver and the piezo actuator, a signal amplifier connected across the sensing resistor to amplify the signal applied to the sensing resistor; a signal processor that removes noise of the signal output from the signal amplifier; a controller that determines a signal passing through the signal processor as a reference signal in a state in which bubbles are not introduced into the inkjet head; and a storage unit that stores the signal determined as the reference signal in the controller. The controller calculates a difference between the signal passing through the signal processor and the reference signal to generate a detection signal and determine a state of the inkjet head.

Device and method for managing piezo inkjet head

There is provided an apparatus for and method of driving a multi-nozzle piezo-inkjet head based on a digital grayscale, the apparatus including: a control unit providing a pulse data signal having at least one pulse waveform according to graphic image data, controlling a voltage variation according to a frequency response characteristic of the multi-nozzle piezo inkjet head, and controlling a voltage amplification, so as to eject droplets of ink at a previously set jetting frequency according to the graphic image data; a variable voltage supply unit generating a varied operating voltage by varying a level of a previously set direct current voltage; and an amplification circuit unit generating a voltage driving waveform including at least one pulse waveform having the level of the varied operating voltage, and supplying the voltage driving waveform to the multi-nozzle piezo inkjet head.

Apparatus for and method of driving multi-nozzle piezo-inkjet head based on digital grayscale

There is provided a driver for an inkjet head, capable of smoothly driving the inkjet head. The driver for an inkjet head includes: an amplifying unit having a plurality of amplifiers individually outputting signals having voltage levels amplified in accordance with a predetermined gain in a predetermined cycle; a coupling unit coupling the signals outputted from the plurality of amplifiers as a single driving signal in accordance with a control signal; a controlling unit controlling the coupling of signals performed by the coupling unit; and a switching unit switching a signal transmission path through which the single driving signal is transmitted to an inkjet head.

Driver for inkjet head

Disclosed herein is an ejecting apparatus including: an upper body which includes an inlet through which ejectable fluid flows in from an external source, a channel which fluidly communicates with the inlet and through which the ejectable fluid flows, and an upper mounting portion which fluidly communicates with the channel and is opened downwardly; a lower body which includes a lower mounting portion which is opened upwardly to correspond to the upper mounting portion, and a nozzle slit which fluidly communicates with the lower mounting portion to eject the ejectable fluid to an outside, the lower body being fastened to the upper body, and a nozzle chip which is interposed between the upper mounting portion and the lower mounting portion to receive the ejectable fluid from the channel and discharge the ejectable fluid into the nozzle slit by being driven by an actuator.

Growing community of inventors

Gyeonggi-do, South Korea

Byung Hun Kim