Korea Research Institute of Standards and Science

Nanofocus Inc.

Byong Chon Park

Sang Jung Ahn

Jae Wan Hong

Jin Ho Choi

Won Young Song

Chae Ho Shin

Dal Hyun Kim

Joon Lyou

ChaeHo Shin

Seung Hun Baek

Woon Song

Ju Youb Lee

DalHyun Kim

Ki Young Jung

Provided is a linear structure for displacement transmission that can be bent in a second direction or a third direction when force in the second direction or the third direction is applied and can transmit a displacement in a first direction from an end of one side to an end of the other side when force in the first direction is applied. The linear structure includes a displacement transmission plate and a plurality of displacement transmission rods disposed radially on the displacement transmission plate to transmit the displacement in the first direction from the end of one side to the end of the other side.

Linear structure for displacement transmission, and one-dimensional and three-dimensional micro movement device using same

Provided is a measuring method for an atomic force microscope that scans a surface of a sample with a probe to measure a surface property of the sample, the measuring method including detecting a motion of the probe while vibrating the probe on the surface of the sample, acquiring surface information on the sample by using a variation in the motion of the probe, and controlling the probe by using the surface information on the sample. The surface information on the sample may include a position and a slope of the surface. The vibrating of the probe on the surface of the sample may include performing a circular motion by the probe around axes perpendicular to a scan direction of the probe and to a height direction of the sample.

Measuring method for atomic force microscope

An object of the application is to provide a head-integrated for an atomic force microscope capable of realizing minimization of a weight and a volume and improvement of structural stability by optimizing a head structure of the atomic force microscope. Another object of the application is to provide a head-integrated atomic force microscope capable of being utilized for imaging a large-area sample by enabling high-rate head scan due to dynamic characteristics improved by mounting the integrated-head described above. Still another object of the application is to provide a composite microscope including a head-integrated atomic force microscope, capable of performing high-rate position search and imaging and performing precise observation of a three-dimensional shape up to an atomic image level in a region of interest by combining the head-integrated atomic force microscope having the improved dynamic characteristics as described above and an electron microscope or an optical microscope with each other.

Head-integrated atomic force microscope and composite microscope including same

Provided is a fusion measurement apparatus which increases or maximizes the reliability of a measurement. The fusion measurement apparatus includes an atomic microscope for measuring a surface of a substrate at an atomic level, an electron microscope for measuring the atomic microscope and the substrate, and at least one electrode which distorts the path of a secondary electron on the substrate covered by a cantilever of the atomic microscope so that the secondary electron proceeds to an electron detector of the electron microscope.

Substrate measurement apparatus with electron distortion unit

An apparatus for repairing a photo mask, including a repairing atomic force microscope configured to repair a defective portion of the photo mask in a photo mask repair process, an electron microscope configured to navigate the repairing atomic electron microscope to the defective portion of the photo mask and to observe the photo mask repair process, and an imaging atomic microscope configured to image in-situ a shape of a repaired photo mask.

Apparatus and method for repairing photo mask

Growing community of inventors

Daejeon, South Korea

Byong Chon Park