Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Sk Siltron Co., Ltd. (1 from 80 patents)
1 patent:
1. 12288699 - Single wafer-type wafer cleaning device and method for controlling surface roughness of wafer using same