Samsung Electronics Co., Ltd.

Bumseok Seo

Kiseok Lee

Jun Ho Lee

Chan-Sic Yoon

Jemin Park

Juik Lee

Sooho Shin

Kwangmin Kim

Hoin Lee

Ilyoung Moon

A semiconductor device includes an alignment key on a substrate. The alignment key includes a first sub-alignment key pattern with a first conductive pattern, a second conductive pattern, and a capping dielectric pattern that are sequentially stacked on the substrate, an alignment key trench that penetrates at least a portion of the first sub-alignment key pattern, and a lower conductive pattern in the alignment key trench. The alignment key trench includes an upper trench that is provided in the capping dielectric pattern that has a first width, and a lower trench that extends downward from the upper trench and that has a second width less than the first width. The lower conductive pattern includes sidewall conductive patterns that are separately disposed on opposite sidewalls of the lower trench.

Semiconductor devices with alignment keys

Growing community of inventors

Yongin-si, South Korea

Bumseok Seo