Samsung Electronics Co., Ltd.

Bumjoon Youn

Suhyun Kim

Kwangsub Yoon

Narak Choi

Yigwon Kim

Jeonghyun Kim

Jimyung Kim

Hyunju Song

A semiconductor device includes a substrate including a key region, a dummy active pattern provided on the key region, a dummy channel pattern provided on the dummy active pattern, the dummy channel pattern including a first plurality of semiconductor patterns spaced apart from each other, an epitaxial pattern connected to the dummy channel pattern, and a first sub-key pattern provided on the dummy channel pattern. The first sub-key pattern encloses a top surface, a bottom surface, and side surfaces of each of the first plurality of semiconductor patterns.

Semiconductor device including key region and key pattern and method of fabricating the same

A semiconductor device includes a circuit pattern on a substrate, a shielding pattern on the circuit pattern and constituted by a plurality of parallel bars, and lower overlay marking on the shielding pattern and constituted by a plurality of parallel bars which define parallel slits between the bars. The pitch of the bars of the shielding pattern is smaller than the pitch of the bars of the lower overlay marking.

Semiconductor devices having shielding pattern

Growing community of inventors

Suwon-si, South Korea

Bumjoon Youn