Applied Materials, Inc.

Unitest Inc.

Will Technology Co., Ltd

Cosmic Roud Korea Co., Ltd.

Bum Jin Park

Bong Hwan Kim

Jong Bok Kim

Talex Sajoto

Hee Sang Chae

Seong Ju Kim

Sung Chul Cho

Sun Il Kim

Young Sam Na

Chi Woo Lee

Yeon Sang Cho

Seok Yul Jun

Hyong Seok Oh

Ha Sung Song

The present invention relates to an electrolyzed water manufacturing device for producing hypochlorous acid water containing hypochlorous acid using hydrochloric acid as an electrolyte, comprising: a hydrochloric acid container for storing the hydrochloric acid as the electrolyte; an electrolytic bath which is connected to the hydrochloric acid container, includes an electrode, and produces slightly weak acidic hypochlorous acid water containing a high-density chlorine solution through electrolysis of the hydrochloric acid; a hydrochloric acid supply pump provided between the hydrochloric acid container and the electrolytic bath so as to supply the hydrochloric acid to the electrolytic bath; and a venturi pipe which is connected to an upper part of the electrolytic bath, is formed between an inlet and an outlet through which dilution water passes, includes a neck part having a smaller pipe diameter in comparison with the inlet and the outlet, and an extraction pipe for connecting the neck part and the electrolytic bath, such that the high-density chlorine solution generated from the electrolytic bath is aspirated through the reduction of the pressure generated from the neck part when the dilution water passes through, and the aspirated high-density chlorine solution is diluted using the dilution solution and the diluted high-density chlorine solution is discharged. The apparatus for producing slightly weak acidic hypochlorous acid water, according to the present invention further, comprises: a discharging pipe connected to the outlet of the venturi pipe; and a screw blade which is inserted into the discharging pipe and accelerates the contact reaction between the high-density chlorine solution discharged from the non-diaphragm type electrolytic bath and the dilution water, wherein the screw blade is preferably composed of flexible plastic material.

Apparatus for producing slightly weak acidic hypochlorous acid water

Electrostatic chucks and methods of manufacturing the same are provided herein. In some embodiments, an electrostatic chuck comprises an electrically conductive body having one or more channels formed in an upper surface thereof; a plate positioned within the one or more channels to define one or more plenums between the body and the plate, wherein the surfaces of the plenum are anodized; one or more fluid passages disposed in the plate and fluidly coupling the one or more plenums to the upper surface of the body, wherein the surfaces of the fluid passages are electrically insulated; and a dielectric layer disposed over the upper surface of the body and the plate, wherein the dielectric layer forms a support surface for a substrate to be disposed thereon.

Electrostatic chuck having reduced arcing

A method for manufacturing a probe structure of a probe card is disclosed. In accordance with the present invention, a portion of a substrate exposed through a crossing region of one more probe beam regions defined by a first mask layer pattern and a windows defined by a second mask layer pattern are etched to form one or more self-aligning probe tip regions, thereby preventing a misalignment of the one or more probe tip regions.

Method for manufacturing probe structure of probe card

A method for manufacturing a probe structure is disclosed. In accordance with the method, two semiconductor substrates having different crystal directions are bonded and selectively etched utilizing an etch selectivity due to the different crystal directions to form a probe tip region and a probe beam region. A cantilever structure for a probe card is formed by filling the probe tip region and the probe beam region with a conductive material.

Method for manufacturing probe structure

Growing community of inventors

Seoul, South Korea

Bum Jin Park