Edwards Vacuum LLC

Budd Edward Faulkner

Mark Kollin Romeo

Peter George Stammers

Matthew Demian Klepp

Brent Haslett

Brett Trevor Lawrence

Nicholas Daniel Hutton

Craig Richard Charles Turner

There is provided a method of detecting the temperature of a component of a support system for semiconductor processing equipment, the method comprising: applying a radio frequency identity tag to the component, the radio frequency identity tag having a serial number; reading the radio frequency identity tag with a reader, the reader arranged to read the serial number of the radio frequency identity tag, and to identify the resonant frequency of the radio frequency identity tag; and converting the resonant frequency of the radio frequency tag to a temperature of the radio frequency identity tag.

Detecting component temperature in a system

A vacuum apparatus temperature sensor assembly for measuring the temperature of a vacuum apparatus and a method are disclosed. The vacuum apparatus temperature sensor assembly comprises: a sheet substrate configured to conform to a shape of an item, equipment or apparatus whose temperature is to be determined; and a temperature sensor thermally coupled with the sheet substrate, wherein the sheet substrate is configured to provide a thermal path from the apparatus to the temperature sensor. In this way, the substrate provides a larger area than that of the temperature sensor to couple with the apparatus which enables the average temperature of the apparatus to be more reliably and accurately conveyed to the temperature sensor and make the temperature measurements less reliant on the exact placing of the temperature sensor with respect to the apparatus.

Vacuum apparatus temperature sensor assembly

A fault indicating circuit for an electric heater has a first branch to conduct a supply of electrical ,energy to the electrical heater and includes a temperature sensitive device to interrupt the supply of electrical energy to the electric heater when exposed to a temperature exceeding a set temperature. The fault detecting circuit has a second branch that includes at least an element of a fault indicating device. The first branch has a first resistance R, the second branch has a second resistance Rand the two branches are, electrically in parallel. The first and second resistances R, Rare such that when, in use, the temperature sensitive device operates to allow : electrical energy to flow through the first branch and the fault indicating device is inactive and when the temperature sensitive device operates to interrupt that supply of electrical energy the fault indicating device activates to indicate that the temperature sensitive device has operated to interrupt the supply of electrical energy to the electric heater.

Fault detecting circuits for electric heaters, pipe heaters and pipe heating systems including fault detecting circuits and methods of indicating that an electrical energy supply to an electric resistance heater has been interrupted

A process equipment heating system has a group of electric heaters and a heater checking system. The heater checking system is configured to determine a resistance value Rfor the group of electric heaters, compare the resistance value Rwith a reference resistance value Rand judge a fault condition if the resistance value Rdiffers from the reference resistance value Rby more than a predetermined amount.

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Hillsboro, OR, United States of America

Budd Edward Faulkner