Asml Netherlands B.v.

Bryan Tong-Minh

Wouter Onno Pril

Allard Eelco Kooiker

Suzanne Johanna Antonetta Geertruda Cosijns

Jan Peter Baartman

An encoder includes an optical component and an enclosing device having a first surface portion and a second surface portion. The first surface portion is arranged to receive from an ambient environment a first radiation beam. The second surface portion is arranged to receive from the ambient environment a second radiation beam. The optical component is arranged to combine the first and second radiation beams. The enclosing device is arranged to propagate the first radiation beam along a first path. The first path is between the first surface portion and the optical component. The enclosing device is arranged to propagate the second radiation beam along a second path. The second path is between the second surface portion and the optical component. The enclosing device is arranged to enclose a space, so as to isolate the first path and the second path from the ambient environment.

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Eindhoven, Netherlands

Bryan Tong-Minh