Tokyo Electron Limited

M-dot Inc.

Bryan J Seegers

William Dale Jones

Robert Saunders Murray

Hugh Gybbon Spilsbury

Jonathan A Sherbeck

In accordance with an embodiment of the present invention, a pump assembly for circulating a supercritical fluid is disclosed. The pump assembly comprises an impeller for pumping fluid between a pump inlet and a pump outlet; a rotating pump shaft coupled to the impeller, wherein the pump shaft is supported by corrosion resistant bearings; a rotor of a DC motor potted in epoxy and encased in a non-magnetic material sleeve; and a stator sealed from the fluid via a polymer sleeve. The pump can be of centrifugal type. The bearings can be made of silicon nitride balls combined with bearing races made of Cronidur&#xae; and can operate without oil or grease lubrication. The polymer sleeve can be a PEEK&#x2122; sleeve which forms a casing for the stator. The non-magnetic material sleeve encasing the rotor of the DC motor is preferably made of stainless steel. A portion of the fluid passing through the pump assembly can be diverted over the bearings and/or the rotor and stator.

Pump design for circulating supercritical carbon dioxide

A low-cost atomizing nozzle suitable for use with viscous fuels and other liquids in high and low temperature environments. The nozzle structure comprises a cylindrical hollow tube forming a venturi having inlet and outlet ends, a cylindrical hollow barrel and a fuel catheter. The nozzle provides maximum surface contact between the liquid fuel and atomizing air streams.

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Phoenix, AZ, United States of America

Bryan J Seegers