Electro Scientific Industries, Inc.

Bryan C Gundrum

Xinbing Liu

Ho Wai Lo

Hisashi Matsumoto

Corey M Dunsky

Nicholas J Croglio

A diode-pumped, solid-state laser ( ) of a laser system ( ) provides ultraviolet Gaussian output ( ) that is converted by a diffractive optical element ( ) into shaped output ( ) having a uniform irradiance profile. A high percentage of the shaped output ( ) is focused through an aperture of a mask ( ) to provide imaged to provide imaged shaped output ( ). The laser system ( ) facilitates a method for increasing the throughput of a via drilling process over that available with an analogous clipped Gaussian laser system. This method is particularly advantageous for drilling blind vias ( ) that have better edge, bottom, and taper qualities than those produced by a clipped Gaussian laser system. An alternative laser system ( ) employs a pair of beam diverting galvanometer mirrors ( ) that directs the Gaussian output around a shaped imaging system ( ) that includes a diffractive optical element ( ) and a mask ( ). Laser system ( ) provides a user with the option of using either a Gaussian output or an imaged shaped output ( ).

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Champaign, IL, United States of America

Bryan C Gundrum