Lam Research Corporation

Bryan Anthony Cmelak

John Wiltse

Jacob Lee Hiester

Bin Luo

Sam Jafarian Tehrani

In some examples, an automated tilting system is provided for adjusting an orientation of a component in a substrate processing chamber. The automated tilting system comprises at least one tilt adjustment motor arranged to cooperate with the component and be connected to a portion of the component by a coupling. The coupling is configured such that automated rotational motion by the at least one tilt adjustment motor imparts corresponding axial movement, relative to the at least one tilt adjustment motor or a datum structure, to the connected portion of the component to adjust the orientation of the component in the processing chamber.

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Tigard, OR, United States of America

Bryan Anthony Cmelak