Evatec Ag

Bruno Gaechter

Stephan Voser

Pierre Matteacci

Fabio Antonio Ravelli

A method of manufacturing substrates using a transport and handing-over arrangement for disc shaped substrates, including a carrier and a take-over arrangement. A substrate carrier of magnetisable material has a peripheral protruding rim. An untreated substrate lies in the substrate carrier below the rim. The substrate carrier is taken-over from the take-over arrangement by controlling a distance between a permanent magnet and the substrate carrier and transported from to a treatment station. The controlled drive of the permanent magnets in the take-over arrangement is performed by means of pneumatic piston/cylinder arrangements.

Transport and handing-over arrangement for disc-shaped substrates, vacuum treatment installation and method for manufacture treated substrates

Liquid precursor material of a coating substance and a solvent is provided in a reservoir (STEP, STEP'). In one variant the liquid precursor material is distilled (STEP), the resultant liquid coating substance is vaporized (STEP) and ejected through a vapor distribution nozzle arrangement () into a vacuum recipient () and onto substrateto be coated. Alternatively, the liquid precursor material is directly vaporized (STEP&#x2032;). From the two-component vapor coating substance vapor is applied to substrate&#x2032; to be coated. In this variant separation of solvent vapor and coating substance vapor is performed especially downstream vaporizing (STEP&#x2032;).

Direct liquid deposition

A transport and handing-over arrangement for disc shaped substrates, comprising a carrier () and a take-over arrangement (). Both are moveable relative to each other. A relatively heavy substrate carrier () of magnetizable material is taken-over from the take-over arrangement () by distance control of a permanent magnet () at the take-over arrangement () or is returned therefrom to a carrier (). The controlled drive of the permanent magnets () in the take-over arrangement () is performed by means of pneumatic piston/cylinder arrangements ().

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Ruethi, Switzerland

Bruno Gaechter