Digital Equipment Corporation

The University of North Carolina at Chapel Hill

Shipley Company LLC

Mcnc

Bruce W Dudley

Susan K Jones

Stephen M Bobbio

Edward K Pavelchek

Farid M Tranjan

Mark D Kellam

Thomas D DuBois

John F Bohland

Peter W Freeman

An electrically and mechanically robust microelectromechanical transducer is formed of a pleated dielectric sheet having patterned electrical conductors on the opposing faces thereof. The pleats define a plurality of spaced apart walls, with each wall including an electrically conductive portion at one side thereof. Positive and negative voltages, applied to opposite faces of the pleated sheet, cause the walls to move towards one another by electrostatic attraction. The walls can also move away from one another by electrostatic repulsion upon application of appropriate voltages. The microelectromechanical transducer may be fabricated by fabricating a sheet with integral pleats or by forming a 'self-pleating' flat sheet which forms pleats after conductor fabrication thereon.

Pleated sheet microelectromechanical transducer

The present invention comprises methods for treating photoresists and forming photoresist relief images, including a method comprising providing a photoresist coating having a crosslinked surface layer, treating the photoresist coating with an organometallic material, and developing the photoresist coating to provide a relief image comprising an etch resistant effective amount of organometallic material.

Methods for treating photoresists

Growing community of inventors

Durham, NC, United States of America

Bruce W Dudley