Kla Tencor Corporation

United Technologies Corporation

Bae Systems Information and Electronic Systems Integration Inc.

Bruce W Baran

Richard Earl Bills

Songping Gao

Chris Koliopoulos

Michael Murphree

Allan Wirth

Lawrence E Schmutz

Glenn L Sindledecker

Gerard M Perron

David J Korwan

Theresa L Bruno

Carl G Witthoft

Techniques and structures to facilitate efficient replacement of windows/domes of optical systems, such as turreted pointer/tracker systems and seekers and other such gimbal-based or fixed targeting systems. The techniques can be implemented, for example, in a mounting ring or bezel, wherein the dome/window center of curvature is actively aligned during assembly to a reference feature on a mounting bezel during the dome-to-bezel alignment. This reference feature then mechanically registers the dome-bezel assembly to a given chassis. In some embodiments, the techniques allow for positioning of a replacement window/dome on an optical lens system, such that co-boresight of multiple beam paths is automatically maintained.

Replaceable dome assembly

A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable scan speed beam scanning subsystem, preferably using an acousto-optic deflector, with beam compensation, so that variable scanning speeds can be achieved. Also included are methods and systems for improving the signal to noise ratio by use of scatter reducing complements, and a system and method for selectively and repeatedly scanning a region of interest on the surface in order to provide additional observations of the region of interest.

System and method for controlling a beam source in a workpiece surface inspection system

An improved two-dimensional optical centroid processor ('OCP') wavefront sensor is described in which a scanning mirror 146 scans the wavefront of input light 130 to provide a scanned beam 148 (i.e. a portion of the wavefront). The scanned beam 148 is focused on an OCP 168 filter comprising four rows of mask cells. The filtered light emanating from the cells impinges on one-dimensional photodetector devices 192, 198, 202, 206 (i.e. photodetector rows). Thus, the scanning of the wavefront by the scanning mirror provides two-dimensional measurement while employing one-dimensional photodetector devices. Each of the photodetector devices provides an output to a ratio calculator 201 which is used to correct the tilt in the wavefront by driving a deformable mirror (not shown).

Two-dimensional OCP wavefront sensor employing one-dimensional optical

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Lexington, MA, United States of America

Bruce W Baran