Asml Holding N.v.

Asml Netherlands B.v.

Hughes Aircraft Company

Bruce Tirri

Mehmet Ali Akbas

Nicolaas Ten Kate

Thomas Poiesz

Jan Willem Verhoeven

David Hart Peterson

Satish Achanta

Evelyn Wallis Pacitti

Elizabeth Stone

Richard Bryan Lewis

Joost Wilhelmus Maria Frenken

Ping Zhou

Jeroen Bouwknegt

Pavlo Antonov

Ryan Mayer

A method of fabricating a substrate table includes supporting a table base and disposing a coating on a surface of the table base. The surface of the table base is substantially flat. The coating has a non-uniform thickness. The coating exerts a stress on the table so as to bend the table base. The non-uniform thickness causes a surface of the coating to become substantially flat after the bending.

Lithographic apparatus, substrate table, and non-uniform coating method

There is disclosed a substrate holder, a method of manufacturing a substrate holder, a lithographic apparatus comprising the substrate holder, and a method of manufacturing devices using the lithographic apparatus. In one arrangement, there is provided a substrate holder for use in a lithographic apparatus. The substrate holder supports a substrate. The substrate holder comprises a main body. The main body has a main body surface. A plurality of burls are provided projecting from the main body surface. Each burl has a burl side surface and a distal end surface. The distal end surface of each burl engages with the substrate. The distal end surfaces of the burls substantially conform to a support plane and support the substrate. A layer of carbon based material is provided in a plurality of separated regions of carbon based material. The layer of carbon based material provides a surface with a lower coefficient of friction than a part of the main body surface outside the plurality of separated regions of carbon based material. The layer of carbon based material covers only part of the distal end surface of at least one of the burls. Alternatively, the layer of carbon based material covers the distal end surface and at least a portion of the burl side surface of at least one of the burls.

Substrate holder and a method of manufacturing a substrate holder

A optical fiber polarimeter (10) includes a plurality of polarizing optical fibers (14) each having a different orientation with respect to a common reference line. A charge-coupled device having an array of pixels (32) is adapted to receive the light from the optical fibers (14) and generate a signal relating to the intensity of the light impinging on each pixel to a signal processor (18) that also orders the signals according to the orientation thereof and thereby provides a polarization phase versus intensity signal output.

Optical fiber polarimeter

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Brookfield, CT, United States of America

Bruce Tirri