Prysm, Inc.

Carl Zeiss X-ray Microscopy, Inc.

Kla Corporation

Bruce Borchers

Roger A Hajjar

Claus Flachenecker

Robert N Stark

Thomas Anthony Case

A system and method for rotary motion with vacuum sealing is provided. The system includes a vacuum chamber, a component mount disposed in the vacuum chamber, and a base. A bellows is disposed between the base and the component mount, and the bellows provides a seal between the base and the component mount. The bellows, the base, and the component mount define an actuator compartment therebetween. An actuator is disposed in the actuator compartment. The actuator is configured to rotate the component mount relative to the base in order to align a component disposed on the component mount. Rotation of the component mount relative to the base causes torsional elastic deformation of the bellows.

Vertical convolute metal bellows for rotary motion, vacuum sealing, and pressure sealing

An x-ray source has a target assembly including a target, an electron source for generating electrons to impact the target, and a flight tube assembly separating the target assembly from the electron source and transporting a coolant to the target assembly. The flight tube assembly includes a flight tube interface ring, a target cartridge tube, and an electrical isolation ring between the flight tube interface ring and the target cartridge tube.

Method and system for liquid cooling isolated x-ray transmission target

During operation of a reflection target x-ray source, heat must be removed from many components. The electron beam must be steered to the target and may interact with structures along this path. There is also heat generated in the target itself. This can be excessive, since only a very small percentage of the electron beam's energy is transformed into x-rays. Finally, the x-rays must exit the vacuum through the window, which can also be heated both by the x-rays, reflected electrons, and radiant heat from the target. A water cooled reflective x-ray source provides for water or other fluid cooling of the centering aperture, x-ray target, and/or exit window.

Fluid cooled reflective x-ray source

Scanning beam systems based on a two-dimensional polygon scanner with different reflective polygon facets tilted at different tilt facet angles to use rotations of the polygon scanner to scan one or more optical beams both horizontally and vertically on a surface which can be a display screen or a printing surface.

Beam scanning based on two-dimensional polygon scanner having a designated facet for blanking operation for display and other applications

A flexure assembly includes two metallic flexure arrays molded into a thermoplastic support base. The two flexure arrays are positioned in parallel in the thermoplastic support base to allow rotational movement about one axis while providing high stiffness with respect to off-axis movement. Flexible supports in the two flexure arrays may be interleaved to form a cross flexure configuration. Off-axis stiffness of the flexure assembly prevents harmonic resonance in directions that cannot be compensated for in a single-axis actuator.

Method of forming a flexure assembly

Beam scanning systems based on two-dimensional polygon scanner

Implementations of actuators and capacitor-based position sensors for monitoring and controlling positioning of the actuators are provided, including implementations of actuators that use flexures to provide support to actuators and pivoting mechanisms to the actuators. Such actuators can be electromagnetically activated actuators that include a magnet stator and a coil rotor mounted on a flexure. A positioning sensor, such as a capacitor sensor, is provided to measure and monitor positioning of the actuator and is coupled to a feedback circuit which uses the measured positioning of the actuator to control the actuator.

Positioning sensing and position servo control

Implementations of actuators that use flexures to provide support to actuators and pivoting mechanisms to the actuators. Such actuators can be electromagnetically activated actuators that include a magnet stator and a coil rotor mounted on a flexure. A positioning sensor, such as a capacitor sensor, is provided to measure and monitor positioning of the actuator and is coupled to a feedback circuit which uses the measured positioning of the actuator to control the actuator.

Optical beam control based on flexure actuation with positioning sensing and servo control

Implementations of actuators that use flexures to provide support to the actuators and pivoting mechanisms to the actuators. Such actuators can be electromagnetically activated actuators that include a magnet stator and a coil rotor mounted on a flexure.

Flexure actuator

Scanning beam systems based on a two-dimensional polygon scanner with different reflective polygon facets tilted at different tilt facet angles to use rotations of the polygon scanner to scan optical beams both horizontally and vertically on a surface which can be a display screen or a printing surface.

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Scotts Valley, CA, United States of America

Bruce Borchers