International Business Machines Corporation

Brock E Osborn

Howard H Nick

George G Gifford

Chang-yu Wu

Stanley Robert Jordan

Chang Y Wu

The present invention employs random electrostatic discharges to stress test electrical machinery, particularly digital computer systems running repetitive diagnostic programs. There is provided an interactive capability which allows the user to determine test duration either in terms of a fixed time or in terms of a specified confidence level, the latter case being one in which the system provides the user with an indication of the run time required. Significant improvements over deterministic 'zapping' devices result. The improvement includes solving the equation: ##EQU1## (Where: ##EQU2## as a program step.

Firing method & apparatus for random ESD testing

A system having a computer, test control logic, an electrostatic discharge unit and a high voltage probe unit is provided for performing multiple, random, asynchronous electrostatic discharge testing of machines. The test control logic includes multiple, asynchronous, random, firing logic for controlling the states of a plurality of output lines which send control signals from the computer to the electrostatic discharge unit and the high voltage probe unit. The test control logic allows a user a preference of testing modes through an interactive input graph. The user may specify either a run time experiment or a specific probability of test coverage test.

System and method for performing multiple, random, asynchronous

Analysis of plasma data indicative of gaseous species therein, such as Optical Emission Spectroscopy (OES) data, is aided through the interactive use of a computer. OES data may be calibrated by the computer with minimal input from the user regarding a gas the user knows or suspects is present. The computer then assumes the presence of that gas and assigns relative intensity peaks to known wavelengths for that gas, allowing calibration to take place. Selective identification of particular gases from the data is also possible. Used in conjunction with selective identification, a learning function allows the system to improve the accuracy of future gaseous species identification. Certain characteristics of a particular gas over time, such as intensity at a particular wavelength or at all wavelengths, may also be automatically plotted.

Method and system for analyzing plasma data

Automated, closed loop method and system for monitor and control of semiconductor fabrication processing are described. Optical emissions spectrometer (OES) data readings from a fabrication plasma chamber are statistically analyzed and a novel pattern model (based on Markov random fields) is used in combination with a selective stochastic relaxation technique to identify gaseous species within the chamber from the OES readings. Wavelength and intensity information is also employed to accurately estimate relative concentration levels of identified gases within the chamber. The unique statistical analysis approach described allows real-time monitor and control of physical processing within the fabrication chamber. Several practical algorithms are set forth, including techniques for OES peak identification, peak sharpening, gas identification, and physical processing control.

Method and system employing optical emission spectroscopy for monitoring

The present invention employs random electrostatic discharges to stress test electrical machinery, particularly digital computer systems running repetitive diagnostic programs. There is provided an interactive capability which allows the user to determine test duration either in terms of a fixed time or in terms of a specified confidence level, the latter case being one in which the system provides the user with an indication of the run time required. Significant improvements over deterministic 'zapping' devices result.

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Hyde Park, NY, United States of America

Brock E Osborn