Murata Manufacturing Co., Ltd.

Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Aledia

Brigitte Soulier

Frédéric Voiron

Vincent Beix

Thomas Lacave

Julien El Sabahy

Olivier Girard

Marion Volpert

Denis Renaud

Xavier Hugon

Tiphaine Dupont

Guy Parat

Stephan Borel

Bertrand Chambion

Carlo Cagli

Philippe Gibert

Larry Buffle

Christophe Bouvier

Emilie Pougeoise

Fabienne Goutaudier

Hiroshi Nakagawa

Nacer Aitmani

A capacitor structure that includes a substrate; a conductive layer above the substrate; and a porous layer, above the conductive layer, having pores that extend perpendicularly from a top surface of the porous layer toward the conductive layer. The porous layer comprises a first region in which pores conductive wires are disposed, and a second region in which pores a metal-insulator-metal (MIM) structure is disposed. The first region may be used as a via to contact a bottom electrode of the capacitor structure.

Capacitor structure with via embedded in porous medium

A method of fabricating a semiconductor structure that includes: forming a first metal layer over a wafer; forming a second metal layer over the first metal layer; forming a first porous structure in a first region of the second metal layer located above a circuit area of the wafer and a second porous structure in a second region of the second metal layer located above a dicing area of the wafer, wherein the first porous structure includes a first set of pores, and wherein the second porous structure includes a second set of pores; forming a metal-insulator-metal stack in the first set of pores of the first porous structure; and etching the second set of pores of the second porous structure to expose the dicing area of the silicon wafer.

Method of fabricating a semiconductor structure with improved dicing properties

An electrical device that includes: a metal barrier layer; an anodic porous oxide region on the metal barrier layer; a trench around the anodic porous oxide region reaching the metal barrier layer; a liner at least on a wall of the trench on a side of the anodic porous oxide region forming an electrical isolation barrier and having an opening onto the anodic porous oxide region; a hard mask arranged above the trenches and the liner having an opening onto the anodic porous oxide region. A corresponding manufacturing method is also disclosed.

Device having an anodic porous region surrounded by a trench having an electrical isolation barrier

An electrical device that includes: a substrate; an anodic porous oxide region above the substrate; a first capacitor electrode region arranged in the anodic porous oxide region, extending in the anodic porous oxide region, the first capacitor electrode region having a first wall perpendicular to the top surface; a second capacitor electrode region arranged in the anodic porous oxide region, extending in the anodic porous oxide region, the second capacitor electrode region having a second wall perpendicular to the top surface and facing the first wall of the first capacitor electrode region, the first wall of the first capacitor electrode region and the second wall of the second capacitor electrode region being separated by a dielectric portion comprising a part of the anodic porous oxide region.

Electrical device comprising a capacitor wherein the dielectric comprises anodic porous oxide, and the corresponding manufacturing method

A structure that includes: an insulating layer; a first metal layer above a first portion of the insulating layer; a first porous region of anodic oxide, above and in contact with the first metal layer; and a second porous region of anodic oxide, surrounding the first porous region, in contact with a second portion of the insulating layer adjacent to the first portion of the insulating layer, and in contact with the first metal layer, the second porous region forming an insulating region.

Method for forming product structure having porous regions and lateral encapsulation

An optoelectronic device including a substrate having opposite first and second surfaces; insulation trenches extending through the substrate, surrounding portions of the substrate and electrically insulating the portions from each other, each insulation trench being filled with at least one electrically insulating block and a gaseous volume or being filled with an electrically conductive element electrically isolated from the substrate; at least one light-emitting diode resting on the first surface for each portion of the substrate, the light-emitting diodes comprising wired, conical, or frustoconical semiconductor elements; an electrode layer covering at least one of the light-emitting diodes and a conductive layer overlying the electrode layer around the light-emitting diodes; and a layer encapsulating the light-emitting diodes and covering the entire first surface.

Optoelectronic device comprising light-emitting diodes

A method for producing optoelectronic devices, including the following successive steps: providing a substrate having a first face; on the first face, forming sets of light-emitting diodes including wire-like, conical or frustoconical semiconductor elements; covering all of the first face with a layer encapsulating the light-emitting diodes; forming a conductive element that is insulated from the substrate and extends through the substrate from the second face to at least the first face; reducing the thickness of the substrate; and cutting the resulting structure in order to separate each set of light-emitting diodes.

Method for producing optoelectronic devices comprising light-emitting diodes

An electronic circuit including a semiconducting or conducting substrate having first and second opposite surfaces and at least first and second non-parallel electrically insulating trenches that extend from the first surface in the substrate, define at least one portion of the substrate and join at a junction, the portion of the substrate including a protrusion that extends to the junction.

Electronic circuit comprising electrically insulating trenches

Growing community of inventors

Grenoble, France

Brigitte Soulier