Centre National De La Recherche Scientifique

Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Institut Polytechnique De Bordeaux

Brigitte Pecquenard

Frederic Le Cras

Frédéric Le Cras

Alain Levasseur

Delphine Guy-Bouyssou

Philippe Vinatier

Vincent Dubois

Kyong-Hee Joo

Astrid Gies

A method of preparing an amorphous film of lithiated metal sulfide or oxysulfide of formula LiM(OS)using a lithiated target material:

Method for preparing an amorphous film made from lithiated metal sulfide or oxysulfide

The invention relates to a cathodic sputtering target composition comprising at least a solid lithium-based electrolyte and an inorganic carbon free polymer, and to a method for the manufacturing of cathodic solid sputtering targets using such a composition. The invention also relates to solid sputtering targets obtained by such a method and to their use for the preparation of solid thin films by a sputtering physical vapor deposition process, in particular for the preparation of solid electrolyte thin films inside thin film batteries.

Method for manufacturing of sputtering targets using an inorganic polymer

The disclosure herein relates to a lithium ion conducting electrolyte. This electrolytic material has improved ionic conductivity. The material disclosed herein is an amorphous compound of the formula LiSMONwherein x is between approximately 0.5 and 3, y is between 1 and 6, z is between 0.1 and 1, w is less than 0.3 and M is an element selected from B, Ge, Si, P, As, Cl, Br, I, and combinations thereof. The material can be prepared in the form of a thin film. The electrolyte material can be used in microbatteries and electronic systems.

Lithium ion conducting lithium sulphur oxynitride thin film, and a process for the preparation thereof

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Talence, France

Brigitte Pecquenard