Raytheon Company

Brian T Cunningham

Sergey Liberman

Patricia V Richard

Richard F Adams

Donald L Lee

Bharat I Patel

Tony T Tang

An infrared energy detection apparatus having a first array of infrared detectors adapted to detect infrared energy of a first wavelength and produce an electrical signal corresponding to such detected energy, and a second array of infrared detectors, positioned to intercept infrared energy passing through the first array, and adapted to detect energy of a second wavelength in such intercepted energy and produce an electrical signal corresponding to such detected energy. The first array of infrared detectors includes an array of detector devices formed along a lower portion thereof adapted to detect a portion of radiation impinging on the upper portion thereof and, electronic circuitry disposed between the upper and lower portions and connected to the detector devices for producing electrical signals representative of the detected energy having the first wavelength. The second array of infrared detectors includes an array of detector devices adapted to detect a portion of radiation passed through the first array of detectors and impinging on the second array and having the second wavelength and, electronic circuitry for producing electrical signals representative of the detected energy having the second wavelength. The first array of infrared detectors has formed therein an array of lenses to direct infrared energy impinging on the upper surface to the detector devices formed in the first array.

Radiation detection apparatus

A method is provided for forming a bolometer having an infrared sensitive material disposed on a platform elevated over a surface of a semiconductor body. The method includes forming a thermally insulating support layer to provide the platform and legs for supporting the platform over the semiconductor body. A layer of electrically conductive material is formed over the support layer and onto electrical contacts of an electronic circuit formed in the semiconductor body. The layer of electrically conductive material is patterned into electrical conductors passing, at a proximal end thereof, from the contact region of the electronic circuit upwardly to, at the distal end thereof, the platform region. The patterned electrically conductive layer is used as a mask for selectively removing portions of the support layer exposed by the patterned electrically conductive layer while portions of the support layer remain disposed under such patterned electrically layer.

Microbolometer

An integrated circuit having a semiconductor layer having formed therein a electronic circuit. An electrical device, electrically connected to the electronic circuit, has a corrugated platform supported over, displaced from, and integrally formed with, the substrate. In a preferred embodiment the electrical device is a bolometer and the electronic circuit is a read out circuit for the device. The platform includes a surface member and a leg, a proximate end of the leg being disposed on the substrate and the distal end being elevated from the substrate and terminating at the surface member. Preferably the leg and the surface member are corrugated. The supporting surface has a corrugation parallel with the leg. The surface member is supported, as a corrugated air-bridge, over the surface of the substrate by corrugated legs. The temperature sensitive resistive material is formed over the corrugated surface member. Electrical conductors are formed over the legs, one end being in contact with the electrical contacts and the other ends being connected to the portions of the temperature sensitive resistive material adjacent the distal ends of the legs.

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Watertown, MA, United States of America

Brian T Cunningham