Rohm and Haas Electronic Materials Cmp Holdings, Inc.

Other

Brian T Cantrell

James T Murnane

Jeffrey Borcherdt Miller

Robert A Brady

George McClain

Christopher Alan Young

Kathleen McHugh

Durron Andre Hutt

Jeffrey James Hendron

Kenneth Vavala

The present invention provides an apparatus for use in mixing and dispensing a curable fluid stream (stream) into an open mold to fill the mold to make polishing pads for chemical mechanical planarization of substrates. The apparatus comprises an actuator frame on which is mounted (i) a set of two plates releasably attached to the actuator frame and adapted to cut the stream when the mold is full and to release from the actuator frame after cutting the stream, and (ii) a dispenser unit for continuous pouring of the stream into an open mold, the apparatus adapted to enable removal of the released plates from the actuator during the continuous pouring after the mold is full, e.g. by raising the actuator frame and the (ii) dispenser unit, whereby one can place a container above the mold to catch the plates.

Auto catch apparatus and method of use in making chemical mechanical polishing pads

A method of manufacturing grooved polishing layers for use in chemical mechanical polishing pads is provided, wherein the formation of defects in the polishing layers are minimized.

Method of manufacturing grooved chemical mechanical polishing layers

Various embodiments, aspects and features of the present invention encompass a system and method for an adjustable chassis system ('ACS') that may be removably fixed to a payload object so that transport of the object across rough or uneven terrain is made less burdensome. Notably, some embodiments of an ACS may be integral to a given payload object. Certain embodiments of an adjustable chassis system advantageously do not include axles, yet may be raised or lowered to adjust ground clearance of the chassis and payload object. Moreover, certain embodiments of an ACS may be easily disassembled or collapsed for compact storage. Yet another advantage of certain ACS embodiments is that, by virtue of the independent side-to-side height adjustment, a payload object carried by the ACS may serve as a level seat or work surface over inclined or uneven ground.

Adjustable chassis system

A method of manufacturing polishing layers having a window for use in chemical mechanical polishing pads is provided, wherein a plurality of polishing layers having an integral window are derived from a cake, wherein the formation of density defects in the cake and the surface roughness of the polishing layers formed are minimized.

Method of manufacturing chemical mechanical polishing layers having a window

A method of manufacturing polishing layers for use in chemical mechanical polishing pads is provided, wherein a plurality of polishing layers are derived from a cake, wherein the formation of density defects in the cake and the surface roughness of the polishing layers formed are minimized.

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Port Deposit, MD, United States of America

Brian T Cantrell