General Scanning, Inc.

Nutfield Technology, Inc.

Instrument Associates LLC

Brian Patrick Stokes

Carl Brian Candiloro

Robert T Milkowski

Jean I Montagu

Herman Deweerd

Pierre J Brosens

Steven M Burgarella

Hans Bengtsson

Albert K Bukys

Peter Honkanen

Stephen O'Dea

An annular position detection method provides a plurality of light emitters on a first imaginary circle centered on an axis, the emitters directing individual, well-defined, overlapping light beams to a pair of light detectors positioned on a second imaginary circle centered on that axis. The detectors include pairs of diametrically opposite photosensors producing outputs depending upon the areas thereof exposed to light from the emitters. A light blocker is rotatably mounted on the axis so that the blocker blocks light to different extents of the photosensors depending upon its orientation about the axis. The outputs from all of the photosensors are processed to produce a position signal that varies with the angular position of the blocker and the relative intensities of the emitters are adjusted so that the position signal is substantially linear at all operative angles of the blocker. Apparatus for practicing the method is also disclosed.

Optical angular position detection apparatus and method

Techniques are described for laser-scribing a feature on a surface in relation to a reference feature on that surface, such as a feature created by a previous placement of the laser beam. In particular, using a laser beam focusing and deflection system to direct a laser scribing spot onto a surface through an optical path, an optical detection system provides reliable detection of the position of an existing feature on the surface as viewed through the optical path of the deflection system. Based on feedback provided from the detection system to the deflection system, the position of the laser beam may be modified through the deflection system in relation to the viewed feature to scribe a subsequent feature on the surface which tracks the existing feature in real time. A method of scribing to accomplish the objectives is also disclosed.

Laser beam scribing system

A torque motor configuration that minimizes off-axis magnetic forces emanating from adjacent energized coils acting on a magnet. The motor includes a stator comprising a sleeve with conductive coils disposed thereon, and the stator further defining a rotor opening, and a rotor disposed in the rotor opening comprising a magnet disposed on a shaft with the sleeve being shorter than the magnet and the coils including turn around zones beyond respective ends of the sleeve. The motor may be incorporated into an optical scanning system including optical elements for detecting light from a light source.

Moving magnet torque motor

A positioning assembly including a motor, a position sensor, an isolator for coupling the motor to the sensor. The motor may have all surface areas, except that surface area coupled to the sensor via the isolator, exposed to a cooling medium such as air. In an exemplary embodiment, the present invention may be utilized in an optical scanning system.

Positioning assembly including a thermally de-coupled torque motor and system incorporating the same

A bi-directional optical scanning system includes a spring-stiffened, taut-band mechanical subsystem that translates rotational motion of a servo-controlled actuator to translational (scan line or 'fast axis') motion of a sample relative to a stationary objective lens. A first taut steel band attaches to a first end of a shuttle that moves the sample over the fast axis. The band then wraps partially in one direction around a light-weight wheel that is rotated by the servo-controlled actuator. The second end of the band attaches to a pre-loaded spring that is, in turn, attached to the wheel. A second taut steel band wraps partially around the wheel in the opposite direction, with one end of the band attached to the wheel and the other end attached to a second end of the shuttle. When the wheel rotates in one direction, the first band pulls the shuttle, and thus, the sample, in the forward scan direction. When the wheel rotates in the opposite direction, the second band pulls the shuttle and the sample in the backward scan direction. As the wheel rotates, the first band fits into a slit in the second band where the two bands would otherwise overlap. Each band thus remains tightly wrapped around the wheel. The wrap angle associated with the overlay of the first band on the wheel is carefully chosen to ensure that the band does not slip relative to the wheel in response to forces associated with the acceleration of the sample or differences in thermal expansion of the wheel and the band. There is thus a known relationship between the rotational movement of the wheel and the translational movement of the sample even under varying environmental conditions.

Bi-directional scanning system with a pixel clock system

A variable-capacitance transducer detects the angular position of a rotatable member. The transducer includes a first capacitance plate having a plurality of electrically conductive capacitance electrodes, a second capacitance plate spaced therefrom, and a dielectric element located between the plates. At least two of the electrodes are interconnected by a conductive trace. The dielectric element or one of the plates is fixedly mounted on the rotatable member. The electrodes on the first capacitance plate, in conjunction with the second capacitance plate, form a plurality of capacitances that vary as the angular position of the rotatable member changes. A conductive guard partially envelopes the conductive trace and a conductive guard partially envelopes the electrodes on the first capacitive plate. A spacer defines the distance between the capacitance plates and has a coefficient of thermal expansion and dimensions that cause the distance between the capacitance plates to vary by an amount calculated to compensate for changes in plate area with temperature. The transducer includes a parasitic capacitor plate having a position that is adjustable to compensate for parasitic capacitance. An electromagnetic shield is constructed and positioned, with respect to a driver that controls the rotatable member, such that the shield tends to prevent electromagnetic radiation from the driver from affecting the capacitances between the capacitance plates.

Variable-capacitance position transducing

An element that moves resonantly has its resonant frequency dynamically tuned to a desired frequency by two components that cooperate via magnetic fields, one component being mounted for motion with the moving element.

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Windham, NH, United States of America

Brian Patrick Stokes