Average Co-Inventor Count = 5.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Kla Tencor Corporation (1 from 1,787 patents)
2. Sensarray Corporation (1 from 14 patents)
2 patents:
1. 7855549 - Integrated process condition sensing wafer and data analysis system
2. 7135852 - Integrated process condition sensing wafer and data analysis system