Edwards Vacuum LLC

Brian Matthew Layng

Gregory Ryan Le Mon

Willie Ashe

Sean David Tischler

A vacuum pump comprises an inlet flange for connecting to a vacuum chamber, where the inlet flange comprises a plurality of apertures for receiving a plurality of protruding fixing elements extending from the vacuum chamber. The protruding fixing elements comprise an enlarged retaining portion at an end remote from the vacuum chamber and a fastener receiving portion having at least one radial dimension that is smaller than a corresponding dimension of the enlarged retaining portion. A fastening mechanism is provided that comprises a plurality of slots each extending from a same side of a plurality of apertures. The fastening mechanism is configured to be rotatable between a mounting position in which the apertures are aligned with the protruding fixing elements and a sealing position in which the slots are aligned with the protruding fixing elements.

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Hillsboro, OR, United States of America

Brian Matthew Layng