Lam Research Corporation

Brian Knight

Karl Frederick Leeser

Sunil Kapoor

David Michael French

Eller Y Juco

Jacob Lee Hiester

Aaron Bingham

Brett Herzig

David Alan Metz

A circuit tuning radio frequency (RF) power. The circuit includes a low to mid frequency (LF/HF) tuning circuit including a variable LF/MF capacitor coupled in series with an LF/MF inductor. The LF/MF tuning circuit is coupled between ground and a common node configured to receive an RF input. The circuit includes a high frequency (HF) tuning circuit coupled in parallel to the LF/MF tuning circuit between ground and the common node. The HF tuning circuit includes a variable HF capacitor coupled in series with an HF inductor. Cross parallel isolation occurs between the LF/MF inductor of the LF/MF tuning circuit and the HF inductor of the HF tuning circuit when adjusting the variable LF/MF capacitor or variable HF capacitor.

Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system

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Beaverton, OR, United States of America

Brian Knight