Microsoft Technology Licensing, LLC

Cymer, Inc.

Asml Netherlands B.v.

Zynon Technologies, LLC

Zynon Technoologies, LLC

Brian E King

Mehmet Iyigun

Yevgeniy Bak

Emily Nicole Wilson

Patrick L Stemen

Neel K Jain

Kirsten Valery Stark

Vasilios Karagounis

Sushu Zhang

Thomas Patrick Duffey

Herman Philip Godfried

Joshua Jon Thornes

Wilhelmus Patrick Elisabeth Maria Op 't Root

Frank Everts

Floyd Kent Matlack

Zhongquan Zhao

Adam Eckenroth

Kirsten V Stark

Neel Jain

Anoop Gupta

Robert L Chambers

Kathleen Patricia Mulcahy

John A Solaro

Yue Chen

Robert Scott Dietz

Jay S Tourigny

Rahul Ramesh Deshpande

Robert Edward Parkin

Brian P Walker

Cyril S Bouanna

Craig Bartholomew

A method includes: producing a light beam made up of pulses having a wavelength in the deep ultraviolet range, each pulse having a first temporal coherence defined by a first temporal coherence length and each pulse being defined by a pulse duration; for one or more pulses, modulating the optical phase over the pulse duration of the pulse to produce a modified pulse having a second temporal coherence defined by a second temporal coherence length that is less than the first temporal coherence length of the pulse; forming a light beam of pulses at least from the modified pulses; and directing the formed light beam of pulses toward a substrate within a lithography exposure apparatus.

Reducing speckle in an excimer light source

An injection device () injects a dispensable fluid material (), for example, a liquid sealant, into refrigerant lines of an air conditioning or refrigeration pressurized system, by utilizing the pressure difference between high and low pressure zones of the pressurized system. The device comprises a tube () which contains the dispensable fluid material () and is closed by an outlet valve (). A movable member () houses a spring-loaded check valve () and is disposed downstream of and spaced from the outlet valve (). The movable member () is movable within a passageway () formed in an outlet tube connector (). Upon being connected to a service port () of a pressurized system by an installation nut (), movable member () is forced into engagement with the outlet valve () to open it to dispense fluid material () into service port ().

Fluid material injection device

A fluid injection device () for injecting a dispensible fluid material (), e.g., a liquid sealant, into refrigerant lines of an operating air conditioning or refrigeration system or the like, includes a tube () having at its outlet end a fluid outlet valve () is closed by a valved plug () to provide therebetween an airlock chamber () containing a dried inert gas which prevents reaction, e.g., polymerization, of any liquid sealant which has leaked past the fluid outlet valve () prior to use of the device. The device () is used by removing the valve plug () just prior to use and connecting the outlet valve () to a low pressure zone of the system and then connecting an inlet closure member () to a high pressure zone of the system while the system is in operation. A method of making the device includes displacing air from the device with the inert gas and then introducing the materialinto the tube.

Fluid injection device and method of making the same

Fast computer startup is provided by, upon receipt of a shutdown command, recording state information representing a target state. In this target state, the computing device may have closed all user sessions, such that no user state information is included in the target state. However, the operating system may still be executing. In response to a command to startup the computer, this target state may be quickly reestablished from the recorded target state information. Portions of a startup sequence may be performed to complete the startup process, including establishing user state. To protect user expectations despite changes in response to a shutdown command, creation and use of the file holding the recorded state information may be conditional on dynamically determined events. Also, user and programmatic interfaces may provide options to override creation or use of the recorded state information.

Fast computer startup

A metrology system is used for measuring a spectral feature of a pulsed light beam. The metrology system includes: a beam homogenizer in the path of the pulsed light beam, the beam homogenizer having an array of wavefront modification cells, with each cell having a surface area that matches a size of at least one of the spatial modes of the light beam; an optical frequency separation apparatus in the path of the pulsed light beam exiting the beam homogenizer, wherein the optical frequency separation apparatus is configured to interact with the pulsed light beam and to output a plurality of spatial components that correspond to the spectral components of the pulsed light beam; and at least one sensor that receives and senses the output spatial components.

Homogenization of light beam for spectral feature metrology

A method is performed for estimating the optical spectrum of a light beam. The method includes: projecting the light beam onto distinct spatial areas of a spectrometer, wherein each spatial area receives a different filtered version of the optical spectrum; detecting a characteristic of the projected light beam at each of the distinct spatial areas of the spectrometer; receiving a two-dimensional matrix in which each entry of the matrix provides a relationship between one or more spatial areas and each spectral feature, wherein the two-dimensional matrix is related to the input-output relationship of the spectrometer; and estimating the optical spectrum of the light beam based on an analysis that uses both the detected light beam characteristics and the received two-dimensional matrix.

Recovering spectral shape from spatial output

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Bothell, WA, United States of America

Brian E King