Rudolph Technologies, Inc.

Rudolph Technology, Inc.

Brian Delsey

Cory Watkins

Mark Harless

David Vaughnn

Kevin Barr

Troy Palm

Chetan Suresh

Pat Simpkins

Ralph P Sowden

Matthew M Laberge

Richard Sobotka

Andrey Monjoseph

Shaileshkumar Goyal

Emily Nordick

Gerald Brown

A loadport for handling film frames is disclosed. The loadport is modular and substantially compatible with applicable standards regarding modular equipment. In particular, the load port is substantially interchangeable with loadports not adapted for handling film frames. The loadport has a compact shuttle for moving film frames and flexible alignment mechanisms for aligning film frames and cassettes of different configurations.

Substrate handler

A method and apparatus for dynamically focusing an imaging mechanism on a moving target surface having a variable geometry is herein disclosed. Apparatus for focusing an imaging mechanism may include an objective, a prism, or another optical device that forms part of an optical train of an imaging mechanism, a sensor for measuring a distance to the target surface, and a mechanism for modifying the depth of focus of the objective, prism or other optical device. Data from the sensor may be used to create a predictive model of the target surface. Data from the sensor is also used to fit or correlate the generated model to an exemplary target. Data from the correlated model is used to drive the mechanism for modifying the depth of focus of the objective, prism, or other optical device to maintain the surface of the exemplary target in focus.

Dynamic focusing method and apparatus

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Frisco, TX, United States of America

Brian Delsey