Dow Silicones Corporation

Ddp Specialty Electronic Materials US 9, LLC

Dow Corning Corporation

Jiangsu Nata Opto-Electronic Materials Co. Ltd.

Nata Semiconductor Materials Co., Ltd.

Samsung Electronics Co., Ltd.

Dow Global Technolgoies LLC

Brian David Rekken

David D Devore

Xiaobing Zhou

Michael David Telgenhoff

Barry M Ketola

Byung Keun Hwang

Kimmai Thi Nguyen

Brett Lee Zimmerman

Ruth Figueroa

Michael Salvatore Ferritto

Zachary Wenzlick

Jesse A Maddock

Vasgen Aram Shamamian

Xianghuai Wang

Patrick J Fryfogle

Jung Sik Choi

Nisaraporn Suthiwangcharoen

Jason S Fisk

Noel Mower Chang

Youn Joung Cho

Travis Sunderland

Andrew Millward

Michael Telgenhoff

Won Woong Chung

Sean Reisch

Mrunmayi Kumbhalkar

Joseph C Neuman

Hannah Furnier

Anthony E Foss

Jeanette K Young

Sun Hye Hwang

Anirudha Banerjee

Erich Molitor

Qian Feng

Michael D Telgenhoff

Xianghuai William Wang

A method of making a trihalodisilane, the method comprising: combining a reductive effective amount of an alkylaluminum hydride, a halodisilane comprising at least 4 halogen atoms, and a solvent at a temperature <80° C. and reducing the halodisilane to form a reaction product mixture comprising a trihalodisilane and an alkylaluminum halide.

Synthesis of 1,1,1-trichlorodisilane

A process for preparing a cyclic polysiloxazane is disclosed. The cyclic polysiloxazane may optionally be converted to an a-alkoxy-ou-amino-functional polysiloxane. The cyclic polysiloxazane or the a-alkoxy-oo-amino-functional polysiloxane, may be used as a capping agent for a silanol-functional polyorganosiloxane in a process to make an amino-functional polyorganosiloxane.

Processes for making polysiloxazanes and using same for producing amino-functional polyorganosiloxanes

A method of making an aminosilane, the method comprising: forming a reaction mixture comprising a hydridosilane, an amine and a dehydrogenative coupling catalyst in a reactor; subjecting the reaction mixture to conditions sufficient to cause a dehydrogenative coupling reaction between the hydridosilane and the amine to form the aminosilane and hydrogen gas; and venting the hydrogen gas; wherein the forming of the reaction mixture comprising the hydridosilane, the amine and the dehydrogenative coupling catalyst comprises continuously feeding the hydridosilane to the reactor containing the amine and the dehydrogenative coupling catalyst.

Method of making an organoaminosilane

A method of forming a film on a substrate is disclosed. The method comprises: heating a thiodisilane according to formula (I) (RRRCS)(RN)(Si&#x2014;Si)XH(I) in a chemical vapor deposition (CVD) or atomic layer deposition (ALD) process under thermal or plasma conditions to give a silicon-containing film disposed on the substrate, wherein: subscript s, n, x, h and R, R, R, R, and X are as described herein.

Thio(di)silanes

A SiH-free vinyldisilane compound, which is free of (lacks) a silicon-bonded hydrogen atom. The use of the SiH-free vinyldisilane compound, or a collection of such compounds, as a starting material or precursor for synthesizing or making silicon-heteroatom compounds. The silicon-heteroatom compounds synthesized therefrom; films of and devices containing the silicon-heteroatom compounds; methods of making the SiH-free vinyldisilane compound, silicon-heteroatom compounds, films, and devices; and uses of the SiH-free vinyldisilanes, silicon-heteroatom compounds, films, and devices.

SiH-free vinyldisilanes

Thio(di)silanes comprising a thiosilane of formula (A): (RRRCS)(Si)XH(A) wherein subscript s is from 2 to 4 or a thiodisilane of formula (I): (RRRCS)(RN)(Si&#x2014;Si)XH(I) wherein subscript s is from 1 to 6, and wherein R, R, R, R, X and subscripts n, x and h are defined herein. Also compositions comprising same, methods of making and using same, intermediates useful in synthesis of same, films and materials prepared therefrom.

A method for dehydrocoupling silanes and amines. The method comprises contacting: (a) an aliphatic amine; (b) a silane; and (c) a catalyst which is ZnX, wherein X is alkyl, chloride, bromide, iodide, trifluoromethanesulfonate, bis(trifluoromethane)sulfonamide, tosylate, methanesulfonate or OS(CF)CFwherein x is an integer from 1 to 10.

Catalysis of dehydrocoupling reactions between amines and silanes

A method for making chlorinated silazanes. The method comprises contacting: (a) a disilazane; (b) a chlorosilane; and (c) a catalyst which is a zinc salt of: (i) a sulfonic acid or (ii) a sulfonic acid imide.

Transsilylation catalysis

A composition, comprising: trisilylamine and less than 5 ppmw of halogen. A method of making a silylamine comprising combining ammonia and a compound comprising aminosilane functionality, where the compound comprising aminosilane functionality is according to formula (I) RN(R)a(SiH)(I), where Ris an organic polymer, a C-hydrocarbyl group or &#x2014;SiR, where Ris Chydrocarbyl, Ris a C-hydrocarbyl group, H, or &#x2014;SiR, where Ris as defined above, subscript a is 0 or 1, provided that Rand Rmay be the same or different except if Ris phenyl, Ris not phenyl, under sufficient conditions to cause a reaction to form a silylamine and a byproduct.

High purity trisilylamine, methods of making, and use

A method for making tris(disilanyl)amine. The method comprises steps of: (a) contacting a disilanyl(alkyl)amine with ammonia to make bis(disilanyl)amine; and (b) allowing bis(disilanyl)amine to produce tris(disilanyl)amine and ammonia.

Tris(disilanyl)amine

A method of making an organoaminosilane compound, comprising i) combining A) a compound comprising a primary or secondary amine, B) monosilane (SiH), and C) a catalyst, where the catalyst comprises magnesium or boron, where A), B) and C) are combined under sufficient conditions to form the organoaminosilane compound and hydrogen. A method of making a silylamine, the method comprising: i) forming an organoaminosilane compound by i) combining A) a compound comprising a primary or secondary amine, B) monosilane (SiH), and C) a catalyst, where the catalyst comprises magnesium or boron, and ii) combining ammonia and the organoaminosilane compound produced in i) under sufficient conditions to form a silylamine product and a byproduct, where the byproduct is a primary or secondary amine.

Method for making an organoaminosilane; a method for making a silylamine from the organoaminosilane

A method for dehydrocoupling silanes and amines. The method comprises contacting: (a) an aliphatic amine; (b) a silane; and (c) a catalyst which is ZX, wherein X is alkyl, chloride, bromide, iodide, trifluoromethanesulfonate, bis(trifluoromethane)sulfonamide, tosylate, methanesulfonate or OS(CF)XCFwherein x is an integer from 1 to 10.

A method for fabricating a semiconductor device includes forming a structure with a height difference on a substrate and forming a dielectric layer structure on the structure using an atomic layer deposition (ALD) method. Forming the dielectric layer structure includes forming a first dielectric layer including silicon nitride on the structure with the height difference. Forming the first dielectric layer includes feeding a first gas including pentachlorodisilane (PCDS) or diisopropylamine pentachlorodisilane (DPDC) as a silicon precursor, and a second gas including nitrogen components into a chamber including the substrate such that the first dielectric layer is formed in situ on the structure having the height difference.

Method for fabricating semiconductor device including forming a dielectric layer on a structure having a height difference using ALD

Disclosed is a compound of formula (I): (RRN)SiH(NRR) (I) wherein subscript n, R, R, Rand Rare as defined herein. Also disclosed are a method of making, intermediates useful therein, method of using, and composition comprising the compound of formula (I).

Diaminosilane compounds

Disclosed is a compound of formula (I): (RRN)SiH(I), wherein subscript n is an integer from 3 to 9; and each Rand Rindependently is (C-C)alkyl, (C-C)cycloalkyl, (C-C)alkenyl, (C-C)alkynyl, or phenyl; or Ris H and Ris (C-C)alkyl, (C3-C6)cycloalkyl, (C2-C6)alkenyl, (C2-C6)alkynyl, or phenyl; or Rand Rare bonded together to be -RRwherein -R-R- is (C-C)alkylene. Also disclosed are a method of making, intermediates useful therein, method of using, and composition comprising the compound of formula (I).

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Midland, MI, United States of America

Brian David Rekken