Vlsi Technology, Inc.

Brian D Richardson

Miguel A Delgado

Edward R Vokoun, Iii

Elizabeth A Chambers

Rajive Dhar

Gregory N Carter

William K Shu

A method for forming a scribe line on a semiconductor wafer including the steps of: (a) providing a semiconductor substrate; and (b) sequentially providing a plurality of layers over the semiconductor substrate of alternating conductive and insulating types, where each of the layers is provided with an elongated opening is formed relative to a desired scribe line position, and where the openings of at least some of the plurality of layers are wider than openings of preceding layers such that at least one sidewall of a completed scribe line has a pronounced slope extending outwardly from its base. The structure of the present invention is, therefore, a scribe line having sloped sidewalls that greatly reduces scribe line contamination problems and enhances planarization during subsequent spin-on-material processes. The scribe lines can either be elongated openings in the layers, or an elongated mesa formed in the layers.

Integrated circuit scribe line structures and methods for making same

A universal semiconductor interconnect test structure and method for using the test structure is provided for detecting the presence of electrical open or short circuits within the test package. In one embodiment, the test structure comprises a layer of electrically non-conductive substrate and a bonding layer of electrically conductive material over the substrate layer. In a second embodiment, the universal test die comprises a layer of electrically non-conductive substrate and a pattern of electrically conductive material over the substrate layer, wherein the pattern forms a continuous array of individual bonding areas, each of the bonding areas being electrically isolated from adjacent bonding areas by a gap, and wherein the effective pitch of the bonding areas is not more than 25 microns. The universal test die of the present invention is suitable for developing wire bond and mold processes for all pad pitches, all pad layout designs, all package types, and all pin counts. The test die of the present invention greatly accelerates fine pitch development and avoids the burden of multiple test die inventory control. Additionally, the test die of the present invention simplifies wire bond programming and test program development.

Universal test die and method for fine pad pitch designs

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Saratoga, CA, United States of America

Brian D Richardson