National Technology & Engineering Solutions of Sandia, LLC

Brian D Homeijer

Paul J Resnick

Thomas A Friedmann

Michael Wiwi

Michael David Henry

Matt Eichenfield

Benjamin Griffin

Travis Ryan Young

Sean Yen

Bryson Barney

Andrew Ian Young

Katherine M Musick

Robert William Reger

Ryan Austin Shaffer

A resonant beam accelerometer employing a pair of double ended tuning forks and a proof mass having meso-scale mass as it is formed in the handle layer of a SOI wafer and a method of fabricating same is disclosed. The resonant frequencies of the pair of double ended tuning forks change in opposite directions when an externally applied acceleration is in a direction parallel to the pair of double ended tuning forks. Due to the proof mass having meso-scale mass, the resonant beam accelerometer is very sensitive. By employing a lid and a stator cap, the active portions of the resonant beam accelerometer may be sealed in a vacuum to further increase sensitivity.

Large mass MEMS resonant beam accelerometer

A microelectromechanical systems (MEMS) inertial sensing device having a large proof mass with interlocking tabs is disclosed. The interlocking tabs limit motion of the proof mass when subjected to large inertial forces. The interlocking tabs are formed around the periphery of the proof mass and interact with corresponding interlocking tabs formed in a frame to which the proof mass is tethered. The motion of the proof mass is limited by the interlocking tabs, which are formed during MEMS fabrication of the inertial sensing device rather than as part of the packaging process. With a large proof mass, the inertial sensing device can provide high sensitivity in low inertial force environments while the interlocking tabs protect the device when subjected to high inertial forces.

Interlocking proof mass for mems inertial sensing device

There is provided a near-zero-power wakeup system in which a MEMS sensor for mechanical or acoustic signals is coupled to a very-low-power complementary metal oxide semiconductor (CMOS) application-specific integrated circuit (ASIC). Power consumption can be minimized by operating the ASIC with sub-threshold gate voltages.

Low-power MEMS wakeup system

A microelectromechanical systems (MEMS) accelerometer that has high sensitivity to motion along the z axis is discussed. The device includes two symmetrical sets of bilateral, diametrically opposed high aspect ratio flexures that tether a movable proof mass to the frame of the device. The flexures are designed in such a way as to restrict movement of the proof mass along the x and y axes but readily allow motion along the z axis. More specifically, when the device experiences an acceleration along the x or y axes, the proof mass is restricted from moving because some of the bilateral, diametrically opposed flexures are in compression and others are in tension.

High sensitivity single-axis MEMS accelerometer with bilateral flexures

The present application relates to vertically integrated assemblies including a MEMS-based optomechanical architecture. In some embodiments, the assembly includes a MEMS/optoelectronic module, an emitter module, and a detector module, where these modules are vertically integrated. Methods of fabricating such assemblies are also described herein.

Vertically integrated optoelectronics package for MEMS devices

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Albuquerque, NM, United States of America

Brian D Homeijer