International Business Machines Corporation

Brian Christopher Barker

Perry G Hartswick

Nancy T Pascoe

Raymond James Bunkofske

John T Federico

John W Lewis

Olivier Verscheure

Deepak Srinivas Turaga

Lisa Amini

George R Goth

Justin W Wong

Richard L Kleinhenz

John Z Colt, Jr

Gary R Moore

Justin Wai-chow Wong

Susan E Chaloux

Mark L Reath

Horst Zisgen

Edward P Higgins

Lawrence R Bauer

John Colt

Keith D Newton

A solution for managing a manufacturing environment using operating data for each of a plurality of tools in the manufacturing environment. The operating data can include actual resource consumption data and/or actual exhaust generation data for a tool while the tool implements at least a portion of a recipe to manufacture one of a plurality of types of products manufactured in the manufacturing environment. Operation of the manufacturing environment can be configured to optimize one or more aspects of resource consumption and/or exhaust generation during the manufacture of desired quantities of the plurality of types of products within a desired time frame using the operating data.

Manufacturing management using tool operating data

A technique for identifying a defect in an object produced by a controllable process. A first type of data generated as a result of production of the object by the controllable process is obtained. A second type of data generated as a result of production of the object by the controllable process is obtained. The first type of data and the second type of data are jointly analyzed. A defect is identified in the object based on the joint analysis of the first type of data and the second type of data. By way of example, the controllable process comprises a semiconductor manufacturing process such as a silicon wafer manufacturing process and the object produced by the semiconductor manufacturing process comprises a processed wafer. The first type of data comprises tool trace data and the second type of data comprises wafer image data. The tool trace data is generated by a photolithographic tool.

Multi-modal data analysis for defect identification

A semiconductor wafer including a plurality of pits in the semiconductor wafer. The pits are arranged in an information-providing pattern and are readable after completion of processing on the wafer.

Wafer identification mark

A manufacturing control system used in the manufacture of semiconductor products. The system has a custom business logic controller which can be used to define and implement custom business logic that departs from the conventional business logic associated with the several elements of the manufacturing control system both rapidly and in real time. The custom business logic controller is implemented by defining desired business logic within the definitional environment of the controller. Where custom business logic is required, the manufacturing control system operates to activate the custom business logic controller, which then proceeds to execute the desired (custom) series of business logic units. Within this series, the custom business logic controller can execute a continuous series of business logic units, or certain business logic units can be executed conditionally, based on the success or failure of a prior business logic unit or units, or based on some other environmental condition. As a result, any new logic can be easily implemented, without requiring any direct changes to be made to the existing (current) systems, and in such a way that there is no negative impact on production.

Method and apparatus for implementing custom business logic

A method for migrating legacy applications into a new software product architecture using a functional conversion module located within a system controller. The functional conversion module comprises a migration plan shut off. The functional conversion module further comprises three paths or branches through which a functional request can be routed. Functional requests which are not identified in the migration plan are routed through the first path and the functional request is sent to the pre-existing software and executed as requested. Functional requests identified in the migration plan for which the pre-existing software is in control are routed through the second path, and the functional request is sent to the pre-existing software and executed as received. In the background, the functional request is translated for the new software and sent to the new software and executed. Functional requests identified in the migration plan for which the new software is in control are routed through the third path, and the functional request is translated for the new software and sent to the new software and executed. If the pre-existing software has been shut off, the task is complete. If the pre-existing software is not identified as being shut off, the functional request is sent to the pre-existing software and executed as received in the background. Duplicate requests are suppressed by the system controller.

Methodology for migration of legacy applications to new product architectures

In a manufacturing line having a plurality of production jobs performed on a plurality of production units in a plurality of processing areas, a method and related system for selecting a number of production units to be sent to a designated process area other than the plurality of processing areas.

Method and apparatus for controlling product routing in a manufacturing line

A system monitors usage of a tool in a tool set and warns an operator and/or prevents usage of a tool chosen by an operator, subject to possible override by the operator, if permitted, in order to balance usage among tools of the tool set and verify operational conditions of tools of the tool set through usage. The system and method are entirely transparent to the operator and the operator is permitted full flexibility of tool choice unless tool usage becomes unbalanced. The system and method preferably limits usage based on length of consecutive usage and percentage of product processed by each tool. Use of new, modified or repaired tools is also prevented until the tool is certified for a particular process and defined to the system.

Process controller for balancing usage of tool sets

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Poughkeepsie, NY, United States of America

Brian Christopher Barker