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Kla Corporation

Brian C Lin

Song Qing Wu

Tianrong Zhan

Jerry Lin

Jiqiang Li

Tiung-Jen Lin

Andrew Lagodzinski

Methods and systems for selecting measurement locations on a wafer for subsequent detailed measurements employed to characterize the entire wafer are described herein. High throughput measurements are performed at a relatively large number of measurement sites on a wafer. The measurement signals are transformed to a new mathematical basis and reduced to a significantly smaller dimension in the new basis. A set of representative measurement sites is selected based on analyzing variation of the high throughput measurement signals. In some embodiments, the spectra are subdivided into a set of different groups. The spectra are grouped together to minimize variance within each group. Furthermore, a die location is selected that is representative of the variance exhibited by the die in each group. A spectrum of a measurement site and corresponding wafer location is selected to correspond most closely to the center point of each cluster.

Methods and systems for selecting wafer locations to characterize cross-wafer variations based on high-throughput measurement signals

A two-wheeled combination roller skate-ski includes a base with safety straps and front brake, two wheels, a transverse frame and a longitudinal frame. A player may select to use either the transverse frame or longitudinal frame to mount the wheels outwardly of two opposing sides of the base in a position such that intersections of a plane in which the base lies and circles defined by the wheels are chords of the circles. Hubs of the wheels are located above the base of the skate-ski, imparting additional stability to the skate-ski and helping the player to maintain his balance.

Two-wheeled combination roller skate-ski

Growing community of inventors

Zhubei, Taiwan

Brian C Lin