Freescale Semiconductor,inc.

Brian Bottema

Alex P Pamatat

Stephen F Abraham

Nathan R Brown

Keven A Cline

Morris S Poteet

Larry J Bustos

Martin W Cain

A tool for forming a desired pattern on a polishing pad establishes a vibration that is coupled to the polishing pad. The vibration removes small portions of the polishing pad according to the desired pattern. The polishing pad is then used in a chemical mechanical polishing (CMP) step to polish a layer on a semiconductor device.

Method of polishing a layer using a polishing pad

A polishing pad can include a first layer and a second layer. The first layer can have a first polishing surface and a first opening. The second layer can have an attaching surface and a second opening substantially contiguous with the first opening. The polishing pad can further include, a pad window lying within the first opening. The pad window can include a second polishing surface. When the pad would be attached to a platen, the first and second polishing surfaces can lie along a same plane, and an opposing surface of the pad window can abut an exterior surface of a platen window. In another aspect, a polishing apparatus can include an exterior surface of a platen window abutting the polishing pad. In still another aspect, a process of polishing can include polishing a workpiece such that the pad window contacts the workpiece and the platen window simultaneously.

Process of using a polishing apparatus including a platen window and a polishing pad

A polish pad () and platen () assembly for use in chemical mechanical polishing of semiconductor devices includes a platen () having a grooved or channeled surface () which is sealed from the processing environment by an ungrooved portion () at the periphery of the platen (). In addition, the platen () includes one or more passageways () that provide a pathway to ambient or sub-ambient environment. The combination of the sealing region () and the passageway(s) () prevent liquids, vapors or other undesirable contaminants from infiltrating between the pad and platen, and also vent trapped air pockets between the pad and platen.

Grooved platen with channels or pathway to ambient air

A polish pad () and platen () assembly for use in chemical mechanical polishing of semiconductor devices includes a platen () having a vented endpoint window () with one or more venting passageways (e.g.,) and/or a grooved or channeled platen surface () to prevent air pressure buildup in the air gap () by discharging or venting air through one or more vent pathways () formed in the platen to provide a pathway to ambient or sub-ambient environment. The air permeable construction of the vented endpoint window () provides pressure relief for the air gap () between the pad endpoint window () and the vented endpoint window (), but may also include passages () that are filled with an air permeable hydrophobic material which protects the underlying endpoint detection system () from contamination during cleaning of the platen endpoint window ().

Platen endpoint window with pressure relief

Polishing pad, a polishing apparatus, and a process for using the polishing pad

A polishing pad can include a first layer and a second layer. The first layer can have a first polishing surface and a first opening. The second layer can have an attaching surface and a second opening substantially contiguous with the first opening. The polishing pad can further include a pad window lying within the first opening. The pad window can include a second polishing surface and a gas-permeable material. In one aspect, an apparatus can include an attaching surface of a platen lying adjacent to the attaching surface of the polishing pad. In another aspect, a process for polishing can include changing a temperature of a gas within a spaced-apart region formed between a pad and a platen. The process can also include forming a gas flux across the polishing pad after polishing has started.

A polishing carrier head including a retaining ring for defining an area of a polishing pocket region used to polish a predetermined object, is provided. The polishing carrier head may further include a perforated plate positioned lateral to the retaining ring, the perforated plate having a plurality of perforations for permitting fluid flow. The polishing carrier head may further include a flexible membrane having a first region overlying a portion of the retaining ring and the perforated plate and a second region in which a first portion of the flexible membrane overlies a second portion of the flexible membrane to form one or more bellows. The polishing carrier head may further include an edge support ring in contact with the first region of the flexible membrane for clamping the first region of the flexible membrane to the perforated plate.

Polishing carrier head with a modified pressure profile

A system for polishing a substrate has a controller, pressure source, a platen, and a carrier for handling the substrate. The carrier must be able to detect if a substrate is present. In either the case of a false detection of substrate presence or the failure to detect substrate presence, the likely result is damaged substrates, wasted polishing consumables, and down time of the manufacturing facility. Detection is achieved by the substrate causing movement of a plunger and by such movement resulting in a pressure differential that is detected. The reliability of this detection is improved by one or more of a precise relationship of the plunger to a plate that applies pressure to the substrate, a controlled seal that is ensured of being broken when the plunger is moved by the presence of a substrate, and proper spring pressure applied to the plunger to prevent spurious plunger movement.

Polishing system having a carrier head with substrate presence sensing

A chemical mechanical polishing (CMP) tool holds a conditioning disk that is used to remove impurities from a polishing disk used to planarize surfaces, such as a semiconductor surface. The tool uses an elastic disk that is positioned between a clamp and a gimbal hub that pivotally overlies a gimbal plate. The elastic disk is a polymer material, such as for example polytetrafluoroethylene (PTFE). The elastic disk has a central opening and is radially solid around the central opening. Alignment holes and drive mechanism holes pierce the elastic disk which functions to rotate the tool with minimal friction and provides a liquid seal from CMP fluids. Access holes in the gimbal plate permit easy installation and removal of the individual components. The PTFE disk is strong and durable enough to withstand high torque and provide lengthy operation without maintenance.

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Brian Bottema